A type glue and method for mending chromium plate white defect by using the same
A chrome plate and defect technology, applied in the field of chrome plate defect repair, can solve the problems of inability to repair white defects of glass substrates, inability to repair depressions and broken lines with ink, metal repair solution not resistant to weak alkaline cleaning solution cleaning, etc. Difficulty, low cost, and effective adhesion
Active Publication Date: 2009-04-08
深圳清溢光电股份有限公司
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Problems solved by technology
[0004] The purpose of the present invention is to provide a type A glue. The technical problem to be solved is: solve the problems caused by the inability of the ink to repair sags and disconnections, the inability to wash the metal repair liquid after repair with weak alkali cleaning liquid, and the inability to repair the glass substrate with CVD repair. The problem of white defects
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[0025]
Embodiment 2
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[0029]
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Abstract
The invention relates to an A-typed glue which comprises the following raw materials according to the parts by weight: 58-78wt% of a metal nano photoresistive material, 20-40wt% of a curing agent, 0.5%-2wt% of a diluent, and 0.1%-1wt% of a glass promoter, the metal nano photoresistive material is any one of powdered gold, silver, nickel, tin or aluminum oxide, the curing agent is epoxy resin or phenolic resin, the diluent is any one of toluene, xylene, trimethylbenzene, turpentine or camphorated oil, and the glass promoter is silica gel. The invention further provides a method for repairing chromium plate white defects by the A-type glue. The provided A-typed glue and the method for repairing the chromium plate white defects by the A-typed glue solve the problems that printing ink can not repair dent and disconnection, and the chromium plate does not withstand cleaning by weakly alkaline cleaning liquids after being repaired by metal repair solutions, and the white defects caused by a glass substrate can not be repaired by CVD repair; and the glue guarantees the adhesive force of the repaired chromium plate.
Description
technical field [0001] The invention belongs to the technical field of repairing defects of chrome plates, and in particular relates to a type A glue and a method for repairing white defects of chrome plates by using the type A glue. Background technique [0002] The chrome plate is a kind of photomask, also known as a photomask, which is a pattern transfer tool used in the microelectronics manufacturing process. It is made of quartz glass or soda, and the pattern designed by the computer is exposed, Developing, etching and other processes are transferred to the light-blocking material on the surface of the chrome plate to form a new pattern, which is then used in the mass-replication production process of electronic parts. At present, white defects often occur in the production process of chrome plates. The white defects are also called pinhole defects in the industry. They refer to the influence of certain factors during the production and use of chrome plates. Defects fo...
Claims
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IPC IPC(8): G03F1/08G03F1/00G03F1/72
Inventor 王金木
Owner 深圳清溢光电股份有限公司
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