Rock quartz micro mechanical gyroscope based on shear stress detection and method for making same
A micromechanical gyroscope, shear stress technology, applied in piezoelectric effect/electrostrictive or magnetostrictive motor, gyroscopic effect for speed measurement, gyroscope/steering induction equipment, etc., can solve the effect of gyro zero offset It is very large, limiting the sensitivity of the micromachined gyroscope, and the complex electrode manufacturing process, etc., to achieve the effect of eliminating the influence of unbalance, novel structure, and improving anti-interference.
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[0041] The present invention will be described in further detail below in conjunction with the accompanying drawings and specific embodiments.
[0042] Such as figure 1 , figure 2 and image 3 Shown, a kind of quartz micromechanical gyroscope based on shear stress detection of the present invention, it comprises support mass block 2, the first cantilever beam 3, the second cantilever beam 4, the first driving beam 5, the second driving beam 6, four A movable mass and a driving electrode and a detecting electrode, the first cantilever beam 3 and the second cantilever beam 4 are symmetrically arranged at both ends of the supporting mass 2, and the supporting mass 2 passes through the first cantilever beam 3 and the first driving beam 5 connected, the supporting mass 2 is connected with the second driving beam 6 through the second cantilever beam 4, and the arrangement direction of the first driving beam 5 and the second driving beam 6 is the same as that of the first cantilev...
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