Polysilicon directional long crystal thermal field
A polysilicon and heater technology, which is applied in the growth of polycrystalline materials, crystal growth, single crystal growth, etc., can solve the problems of poor crystal growth quality, complex structure, slow crystal growth, etc., and achieves low crystal stress and crystal dislocation rate. Low, low thermal shock effect
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[0020] The present invention mainly consists of a thermal insulation cage body 1, a heater 6 and a heat exchange table 5 placed in the thermal insulation cage body 1, and a support guide rod 4 placed at the bottom of the thermal insulation cage body 1 that can move vertically up and down. The thermal insulation bottom plate 2 is composed of the thermal insulation partition plate 7 placed between the side of the thermal insulation cage body 1 and the heat exchange platform 5; the thermal insulation cage body 1 and the thermal insulation bottom plate 2 form a chamber 3 , the heater 6 and the thermal insulation base plate 2 are respectively controlled by the controller 8 of the peripheral; The surface is directly connected, the bottom of the thermal insulation cage body 1 is an L-shaped structure and is connected to the two ends of the thermal insulation bottom plate 2, and the two ends of the thermal insulation bottom plate 2 are L-shaped structures and is connected to the bottom...
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