Three-cavity multichannel optical spectrum step type integrated optical filter

A multi-channel, step-type technology, applied in the field of three-cavity multi-channel spectral step-type integrated filters, achieves the effects of good channel spectral squareness, accurate positioning and improved yield.

Active Publication Date: 2008-11-12
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The purpose of the present invention is to provide a multi-cavity micro-integrated optical filter to solve the technical problems of lightweight and miniaturization of aerospace instruments

Method used

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  • Three-cavity multichannel optical spectrum step type integrated optical filter
  • Three-cavity multichannel optical spectrum step type integrated optical filter
  • Three-cavity multichannel optical spectrum step type integrated optical filter

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Embodiment Construction

[0015] Below in conjunction with accompanying drawing, the present invention will be further described: according to strength requirement, select the gem piece that size is 20mm * 10mm as base. Silicon (Si) and silicon dioxide (SiO 2 ) as high refractive index materials (n H ) and low refractive index materials (n L ), the number of channels formed when n=4 is N=2 n =16, the geometric size of each channel is 1mm×6mm, the mask used is as follows figure 2 shown.

[0016] Take the center wavelength λ 0 = 1.25 μm, the process is as follows: (1) prepare the film system (L H)^22.37L on the substrate; (2) etch the first resonant cavity with an ion beam etching machine; (3) continue to etch Prepare (H L)^4 H 2.37L film system on the sample; (4) etch the second resonant cavity; (5) continue to prepare (HL)^4 H2.37L film system; (6) etch the third resonant cavity; (7) Prepare the HLH film system to complete the integrated optical filter.

[0017] Both silicon and silicon dioxide...

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Abstract

The invention discloses a spectrum step type integrated filter with three cavities and multiple channels. By using a method of changing the optical thickness of a micro-domain in a spacer-layer, the spectrum step type integrated filter of the invention adopts three-cavity structure, combines vacuum plating technology and semi-conductor ion beam etching process and realizes the integration of a bandpass filter with multiple channels in the same substrate. The integrated filter can be widely used for the dense obtaining of multi-spectrum (high spectrum) of aeronautic and astronautic remote sensing instruments. The tiny spectrum step type integrated filter with multiple channels has the advantages that the channels have good spectral rectangle degree and high light splitting efficiency; the combined etching process is adopted, thus greatly promoting the rate of finished products in comparison with the traditional filter integrated in sequence; multiple spectral channels can be formed in a micro-domain, thus being capable of realizing the correct positioning of spatial location and spectral position and being easy to realize high spectrum.

Description

technical field [0001] The invention relates to optical thin film technology, in particular to a three-cavity multi-channel spectral step integrated optical filter. Background technique [0002] As a frontier field of remote sensing technology development, hyperspectral remote sensing has increasingly shown its huge application potential. This technology has been widely used in aviation and aerospace fields. Fine spectroscopic technology is an important part of hyperspectral remote sensing technology, which directly determines the amount of information obtained and spectral resolution of remote sensing instruments. [0003] At present, the spectroscopic methods commonly used at home and abroad mainly include prism spectroscopic, grating spectroscopic, Fourier spectroscopic and filter spectroscopic and so on. Using the first three spectroscopic methods, the corresponding equipment will occupy a large space, and it is difficult to meet the requirements of lightweight and mini...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20G02B1/10
Inventor 段微波刘定权张凤山
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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