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Process for preparing wide-band and wave-absorbing magnetic multilayer membrane

A wide-band, magnetic film technology, applied in the field of preparing a wide-band wave-absorbing layer, can solve problems such as multi-layer films that have not been disclosed, achieve excellent high-frequency absorption characteristics, and the method is simple and easy to implement

Inactive Publication Date: 2010-09-08
LANZHOU UNIVERSITY
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Problems solved by technology

[0005] The bigger problem is that there has not been disclosed any technology with practical application value that can form multilayer multilayer films with broadband electromagnetic wave absorption in the prior art.

Method used

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  • Process for preparing wide-band and wave-absorbing magnetic multilayer membrane
  • Process for preparing wide-band and wave-absorbing magnetic multilayer membrane
  • Process for preparing wide-band and wave-absorbing magnetic multilayer membrane

Examples

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Embodiment Construction

[0023] The following are examples of the present invention.

[0024] In the following examples, the prepared broadband wave-absorbing magnetic film is formed by alternately arranging multilayer magnetic layers and non-magnetic isolation layers for magnetic isolation. The film formation process uses traditional radio frequency magnetron sputtering The radiation equipment deposits the upper magnetic layer and the isolation layer layer by layer on the Si surface. When preparing the magnetic layer, a composite target is used, that is, a non-magnetic metal sheet is evenly placed on the magnetic metal target, such as any one or any combination of Zr, Nb, Hf, Ta, Ti, V , the deposition condition of the magnetic layer is: background vacuum degree -5 Pa, sputtering power 50W corresponds to a power density of 1.7W / cm 2 , the substrate is water-cooled, the Ar flow rate is 20SCCM, and the Ar pressure is 0.2Pa. During the preparation of the magnetic thin film, the purpose of greatly adju...

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Abstract

The invention relates to a method for preparing a wide frequency band wave-absorbed layer on a substrate material. The method for preparing a wide frequency band wave-absorbed magnetic film is as follows: firstly, a first magnetic material layer with a cut-off frequency of f1 is generated on the substrate material by adoption of the vacuum sputtering method; secondly, a first isolated layer is generated on the first magnetic material layer; the process is repeated until an n-layered magnetic material film which is formed by magnetic material layers with different cut-off frequencies isolated by isolated layers is formed on the substrate finally, wherein, the isolated layers can be generated by utilization of general physical film forming technology.

Description

technical field [0001] The invention relates to a method for preparing a broadband wave-absorbing layer on a base material. Background technique [0002] The widespread use of wireless communication equipment has caused more and more serious electromagnetic pollution, resulting in high-frequency electromagnetic shielding materials that have attracted widespread attention. Judging from the current research results, high-frequency magnetic thin film materials have excellent electromagnetic loss effects at high frequencies, and their electromagnetic wave absorption mechanism is the natural resonance of magnetic moments. In order to realize the absorption of microwaves in a wide frequency range, there are two ideas in theory. One is to use a single-layer absorber to increase the damping factor of the magnetic moment resonance and broaden the absorption frequency of the natural resonance. But technically speaking, it is difficult to simply control the damping factor, and excessi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/34C23C14/54B32B15/01
Inventor 薛德胜范小龙李发伸
Owner LANZHOU UNIVERSITY
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