Integrated multilevel two-dimensional optical micro electro-mechanical systems optic switch
A micro-electromechanical system and optical switch technology, which is applied in the field of optical transmission, can solve the problems of poor port-to-port repeatability, reduced optical power loss, and large optical power loss, so as to reduce beam diffusion loss and reduce the size of micromirrors and wafer size, the effect of relaxing the constraints of the manufacturing process
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Embodiment 1
[0060] Since the integrated multi-level two-dimensional optical MEMS optical switch can be decomposed into multiple 2×2 optical switch modules, the number N of input and output ports of the integrated multi-level two-dimensional optical MEMS optical switch of the present invention is an integer multiple of 2, Such as Figure 7 Shown is a schematic diagram of the structure and operation mechanism of the 16×16 integrated multi-level two-dimensional optical MEMS optical switch in Embodiment 1 of the present invention. Wherein the number of input / output ports of the optical switch is 16, and the distance between two adjacent mirrors of the same level, that is, the period of the optical switch, is p. The structure of the optical switch in this embodiment is:
[0061] The first input port to the 16th input port are arranged in order from top to bottom, the distance between the first input port and the second input port is p, starting from the second input port, the nth input port T...
Embodiment 2
[0078] figure 1 Shown is the implementation of the present invention 4 * 4 integrated multi-level two-dimensional optical MEMS optical switch structure and schematic diagram of the operating mechanism; wherein the number of input / output ports of the optical switch is 4, the distance between two adjacent mirrors of the same level is the optical The period of the switch is p, and the structure of the optical switch in this embodiment is:
[0079] The first input port to the fourth input port are arranged in sequence from top to bottom, the distance between the first input port and the second input port is p, starting from the second input port, the nth input port The distance between it and the n+2th input port is p, where n is an even number and n+2 is less than N, that is, the distance between the second port and the fourth port is p; the nth input port and The n+1th input port is at the same position, where n is an even number and n+2 is less than N, that is, the second p...
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