Plane multiple joint robot

A plane multi-joint, robot technology, used in manipulators, claw arms, manufacturing tools, etc., can solve the problems that the manipulator cannot be used in a high-clean environment, and the manipulator does not have a sealing device, and achieves a simple and reliable structure. The effect of machine strength

Active Publication Date: 2008-05-14
SHENYANG SIASUN ROBOT & AUTOMATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] Obviously, manual and ordinary manipulators cannot be used in a high-clean environment at all, and manipulators in a clean environment do not have a sealing device for a vacuum environment
Therefore, there is a need for a small robot for handling semiconductor devices that can adapt to high vacuum and high cleanliness environments and meet the requirements of simple and compact structure, flexible and reliable movement, and high repeat positioning accuracy. However, there is no report on this small robot

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0047] As shown in Figure 1-1, the planar multi-joint robot of the present invention is a handling robot with a symmetrical double-arm structure, which consists of a column assembly 1 and a symmetrical double-arm assembly 2 to realize the lifting, rotating and telescopic movements of the end effector.

[0048] As shown in Figure 1-2, the arms are retracted to the middle position.

[0049] As shown in Figure 1-3, it is the maximum stretch position of the right arm.

[0050] Such as diagram 2-1 , 2-2 , 2-3, and 2-4, the structure of the column assembly 1 is composed of a lifting drive device, an inner shaft, an outer shaft rotation drive device, a linear guide, a linear seal and a rotary seal device, and an outer cover; wherein:

[0051] Lifting driving device comprises leading screw screw nut 16, leading screw support 17, lifting motor 18, lower fixed plate 20, screw nut connecting seat 23, and the lifting motor 18 that is fixed on the lower fixed plate 20 passes synchronous ...

Embodiment 2

[0067] The telescopic arm assembly 2 given in Embodiment 1 belongs to the symmetrical double-arm structure with the same height as the end effector, and the arm structure of the telescopic arm assembly 2 given in this embodiment is a single-arm structure.

[0068] As shown in Figure 3-1, it specifically includes: the first big arm 24, the second big arm 33, the second small arm 26, the third small arm 31, the first connecting seat 27, the first end effector 28, the first One big arm 24 is installed on the upper end of the outer shaft 5 in the linear guide, linear seal and rotary seal device, the second big arm 33 is installed on the upper end of the inner shaft 4 in the linear guide, linear seal and rotary seal device, the first big arm The end of the second arm 24 is hinged with the head of the second arm 26, the end of the second arm 33 is hinged with the head of the third arm 31, and the ends of the second arm 26 and the third arm 31 are hinged with the first connecting seat...

Embodiment 3

[0071] The arm structure of the telescopic arm assembly 2 given in this embodiment is a double-arm structure in which the end effectors are not equal in height.

[0072] Such as Figure 5 As shown, specifically: it is composed of two sets of single-arm structural components given in Example 2, and the two sets of single-arm structural components are arranged in an upper-lower stacked arrangement to form an upper-lower overlapping double-arm structure with unequal heights of end effectors.

[0073] Its working process is identical with embodiment 1.

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Abstract

The invention relates to a planar multi-joint robot, belonging to a mechanical body of industrial robot, which is suitable for handling objects in an environment with high vacuum degree and cleanliness. The invention comprises an upright column component and an arm component; wherein, the upright column component comprises a lifting driving device, an inner shaft rotary drive unit and outer shaft rotary drive unit, a straight-line guidance, a linear seal, a rotary sealing device and an outer housing; the arm component comprises a link mechanism, an end actuator and an installation adjusting mechanism, and is arranged at one end of the upright column component. The invention has the advantages of light weight, good dynamic controlling performance, and high repetitive positioning accuracy.

Description

technical field [0001] The invention belongs to a mechanical body of an industrial robot, in particular to a plane multi-joint robot. Background technique [0002] With the continuous development of industries such as electronics, aerospace, military and biomedicine, modern industrial products and modern scientific experiment activities require miniaturization, precision, high purity, high quality and high reliability. In particular, the rapid development of the domestic semiconductor manufacturing industry requires semiconductor components to be processed in a relatively high cleanliness environment. The general pure clean environment can no longer meet the requirements of the latest semiconductor manufacturing technology, and only a high vacuum environment can meet it. In a high-vacuum environment, all dust particles no longer float in the space, but fall to the bottom of the space by their own gravity, and are sucked away when the space is vacuumed, thereby achieving a ve...

Claims

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Application Information

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IPC IPC(8): B25J1/00B25J18/04
Inventor 王凤利徐方李学威惠龙魏辉
Owner SHENYANG SIASUN ROBOT & AUTOMATION
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