Etching device of organic EL display panel and its method

A technology for electroluminescence display and etching equipment, which is applied in the manufacturing of circuits, electrical components, semiconductor/solid-state devices, etc., can solve the problems of difficult repair, complicated equipment, easy damage and contamination, etc., to shorten the etching time and improve the etching rate. effect, the effect of improving utilization

Inactive Publication Date: 2008-04-30
INESA ELECTRON
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Problems solved by technology

A simple method of etching the ITO layer or the surface metal layer using different etching tanks and water washing tanks, during which the substrate must be taken out or transported manually and dried, which greatly prolongs the etching process and cannot accurately control the etching time. In addition, due to human The factors cannot be strictly controlled, and it is easy to be damaged and stained during the transmission process, and the quality of the etched substrate cannot be guaranteed
Another situation is to reduce the size of the mass-...

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  • Etching device of organic EL display panel and its method

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Embodiment Construction

[0021] The embodiments of the present invention will be described in further detail below in conjunction with the accompanying drawings, but the present embodiments are not intended to limit the present invention, and any similar structures and similar changes of the present invention should be included in the protection scope of the present invention.

[0022] As shown in Figure 1, an organic electroluminescent display panel etching device provided by an embodiment of the present invention has a chip opening 1 from the input end to the output end of the substrate, and an air knife is provided inside to isolate the outside air and prevent the Transition unit 2 for acid gas overflow, etching unit 4 for etching substrates, liquid cutting unit 5 with air knife for blowing off etching solution, water washing unit 6 for washing substrates, and cleaning unit for drying and cleaning substrates Air knife drying unit 7, described each unit is connected by the roller conveying unit 3 tha...

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Abstract

The invention discloses organic electroluminescent display panel etching equipment and a method thereof and relates to display panel etching equipment technical field. The problem to be solved is structure simplification and cost reduction of the panel etching equipment. The display panel etching equipment includes a tape-out opening, a transition unit with an air knife arranged therein, a etching unit used to etch the base plate, a liquid cutting unit arranged on the air knife and used to blow down etching liquid, a rinse unit used to rinse the base plate and an air knife drying unit for cleaning the base plate from an input end to an output end of a base plate in turn. All units are connected by a roller delivery unit used to deliver the base plate. The invention is characterized in that: the etching unit is a cycle etching slot and the rinse unit is a cycle rinse slot. The invention has the advantages of simple structure, easy repair, low manufacture cost, reduced etching time and improved etching effect.

Description

technical field [0001] The invention relates to the technical field of manufacturing electronic semiconductor components, in particular to a technology suitable for etching equipment and related methods of organic electroluminescent panels. Background technique [0002] Organic electroluminescent display device (OLED), as a major branch of flat panel display, has the characteristics of thin panel thickness (less than 2mm), self-illumination, low operating voltage (3-10V), high brightness, high contrast, wide viewing angle and other characteristics. A flat display technology with great potential. Organic electroluminescent display devices have been commercially mass-produced in some manufacturers, but since organic electroluminescent display devices (OLED) are a relatively new display field after all, there are still many difficulties to be overcome. The experimental line equipment for research and development of organic electroluminescent devices is still a necessary equipm...

Claims

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Application Information

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IPC IPC(8): H01L21/00
Inventor 吴玉琦余峰
Owner INESA ELECTRON
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