Architecture for general purpose programmable semiconductor processing system and methods therefor
A technology for processing systems and semiconductors, applied in general control systems, semiconductor/solid-state device manufacturing, control/regulation systems, etc.
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[0017] The invention will now be described in detail with reference to several preferred embodiments as shown in the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. It will be apparent, however, to one skilled in the art that the present invention may be practiced without some or all of these specific details. In other instances, well known process steps and / or structures have not been described in detail so as not to obscure the present invention.
[0018] According to one embodiment of the present invention, a macro engine is advantageously used to extend and enhance the performance of a semiconductor processing system. In other words, a set of control instructions or steps called macros can be created to control the functions of the semiconductor processing system and further store processing information in memory to generate reports. Furthermore, these inst...
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