Detecting biologic sensor associating evanescent field and flexible flat plate wave
A biosensor and evanescent field technology, applied in the field of biosensors, can solve the problems of large deviation of test results, inability to know whether the absorption layer contains too much moisture or other non-specific substances, inability to distinguish non-specific adsorption, etc.
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[0011] The structure of the biosensor of the present invention will be further described in detail with reference to the embodiments given in the accompanying drawings.
[0012] Referring to Fig. 1, a biosensor for joint detection of evanescent field and flexible plate wave is composed of an optical sensing component and an acoustic wave sensing component. The optical fiber 1; the acoustic wave sensing part is made of a silicon film 4 and a layer of aluminum formation 6 sputtered by a magnetron sputtering process on the bottom surface of the silicon film 4, and then sputtered on the aluminum formation 6 An aluminum nitride piezoelectric film 7 formed of a layer of aluminum nitride is formed by laying interdigitated electrodes 8 on the outer surface of the aluminum nitride piezoelectric film 7; the optical fiber support 5 is fixed on the silicon film 4, and the A microfluidic groove 3 capable of carrying detected objects is formed between the support 5 and the hollow surface in...
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