Valve element, valve, selector valve, and trap device
A technology for switching valves and spools, which is applied to valve devices, valve heating/cooling devices, transportation and packaging, etc. It can solve problems such as time required for maintenance, difficulty in confirming reliable sealing of sealing parts, and difficulty in finding fault locations. Achieve the effect of small setting space, simple structure, and easy to find faults
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[0050] Hereinafter, preferred embodiments of the present invention will be described with reference to the drawings.
[0051] 1 and 2 are cross-sectional views showing a schematic configuration of a valve mechanism according to an embodiment of the present invention. The valve 1 can be used as a switching means etc. which alternately switches the flow path of the exhaust gas which flows into the trap which catches the substance in the exhaust gas from a vacuum processing chamber. The valve 1 is provided with an inflow portion 10 for allowing fluid to flow into the housing 2 , and has a substantially symmetrical structure around the inflow portion 10 . That is, in the casing 2, the first flow path 11a and the second flow path 11b are formed at intervals of the above-mentioned inflow portion 10 . A seal plate 6a serving as a valve body driven by the air cylinder 3a is provided in the first flow path 11a. A seal plate 6b serving as a valve element driven by the air cylinder 3b ...
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