Self-cleaning oxidate film and preparation method and usage thereof
An oxide film, self-cleaning technology, applied in chemical instruments and methods, liquid chemical plating, other chemical processes, etc., can solve problems such as hindering the invention of self-cleaning oxide films, low conductivity, and limitations
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Embodiment 1
[0046] Embodiment 1. A kind of self-cleaning oxide thin film is characterized in that this thin film is made of metal ion Nb 5+ Doped SrTiO 3 , with the formula Nb:SrTiO 3 Said that its doping concentration is 1.0mol%; the thickness of the oxide film is 0.4 microns.
Embodiment 2
[0047] Embodiment 2. a kind of self-cleaning oxide film is characterized in that this film is made of metal ion Al 3+ Doped SrTiO 3 , with the formula Al:SrTiO 3 Said that its doping concentration is 1.0%; the thickness of the oxide film is 0.5 microns.
Embodiment 3
[0048] Embodiment 3. a kind of self-cleaning oxide film is characterized in that this film is made of metal ion Zn 2+ Doped SrTiO 3 , with the formula Zn:SrTiO 3 Said that its doping concentration is 1.0%; the thickness of the oxide film is 0.6 microns.
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