Method for establishing micro-electromechanical variable cross-section clamped beam system-level macro model
A method of establishing methods and variable cross-section technology, which is applied to chemical instruments and methods, circuits, electrical components, etc., can solve problems such as two-dimensional changes, large model errors, and elastic distortion resistance, and achieve simplified model structures, simple model structures, and satisfying Effect of Accuracy Requirements
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[0019] 1. Structure of fixed-support variable-section beam
[0020] see figure 1 , the double-ended fixed-support variable-section beam is connected to the narrow beam 101 by two fixed support points 103 , one end of the two narrow beams 101 is connected to the fixed-support boundary, and the other side is connected to the wide beam 102 . The lower part of the beam is an air layer, and the thickness of the air layer is usually on the order of microns. When an external force acts on the variable-section beam, the beam will undergo bending deformation, which will cause elastic recovery force due to the deformation. Within the range of elastic deformation, the greater the deformation caused by the external force, the greater the elastic recovery force. . When the magnitude of the elastic restoring force is equal to the magnitude of the external force, the beam reaches equilibrium and remains at rest. When the external force is removed, the beam will return to its original posi...
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