Multichannel coil filter ion composite film plating device and method

Abstract

The utility model relates to an ion composite coating device for a multi-channel coil filter, which belongs to the field of coating and material surface modification. The device of the present invention comprises: a multi-channel free and open coil filter, a filter shaping and insulating device, a filter positioning device and a workpiece cover, and the multi-channel free and open coil filter has two or more guiding channels and a Mixing channels, two or more guide channels are symmetrically distributed, their entrances are facing two or more cathodic arc targets, their outlets are facing the inlets of the mixing channels, the outlets of the mixing channels are facing the workpiece, and the workpieces are located in the workpiece cover. The filter shaping and insulating device is clamped between adjacent turns of the coil in the filter, and the filter positioning device fixes the filter in the vacuum furnace. The invention also provides a method for applying the above-mentioned device to carry out ion composite coating. The invention has the advantages of simple implementation, smooth surface of the obtained film, controllable composition and structure, and can be applied to the field of optics and high-precision coating.

Description

technical field [0001] The invention relates to a device and method in the technical field of material surface treatment, in particular to a multi-channel coil filter ion composite coating device and method. Background technique [0002] Ion plating using cathodic arc targets (commonly referred to as multi-arc ion plating or vacuum arc ion plating in the industry) is one of the most widely used coating processes at present. Compared with evaporation, sputtering and other coating processes, It has the advantages of high ionization rate (70%-90%), good membrane-base binding force and high deposition rate. But it also has a very big disadvantage: the production of large liquid particles. These large liquid particles usually have a diameter of about 0.1 μm to 10 μm, and they are mixed in the ion flow and move towards the workpiece at a speed of several m / s to hundreds of m / s. When these large liquid particles are deposited in the film layer, they will form macroscopic particle...

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Problems solved by technology

But it also has a very big disadvantage: the production of large liquid particles

[0003] After searching the literature of the prior art, it was found that Chinese Patent No. 96241767.X, named "Rotary Magnetron Columnar Arc Source-Plane Arc Source Multi-Arc Ion Coating Machine", proposes to place a rotating columnar arc in the center of the coating equipment. source, place one or more planar arc sources on the side wall, select different targets for the arc source, and adjust the coating process to obtain a composite film layer, but because no filter device is used, the surface finish of the obtained film layer is affected and restricted. Its application in optical coatings and other fields requiring high-quality coatings

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