Differential piezoelectric three-dimensional force sensor

A sensor and three-dimensional force technology, applied in the measurement of the property force of the piezoelectric device, fluid pressure measurement using the piezoelectric device, etc., can solve the problems of insurmountable errors, weak output signals, and low measurement accuracy, and achieve structural Simple, strong output signal and high measurement accuracy

Inactive Publication Date: 2008-07-16
CHONGQING UNIV
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Problems solved by technology

However, this piezoelectric three-dimensional force sensor not only has a weak output signal when the external force is small, but the measurement accuracy is not high, and it cannot overcome the measurement error caused by changes in the environment (such as temperature and humidity).

Method used

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  • Differential piezoelectric three-dimensional force sensor

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Embodiment Construction

[0015] Differential piezoelectric three-dimensional force sensor (reference Figure 6 , 7 , 8, 9). Same as the prior art, the sensor includes a dynamometer composed of a quartz wafer with a signal output electrode and an insulating positioning frame for fixing the quartz wafer, with an inner cavity in which the dynamometer is packaged and a There is a base with a signal lead-out socket, and a cover that is pre-pressed on the quartz wafer and covers the base. Wherein, the signal output electrodes of the quartz wafer are connected with the signal lead-out sockets 12 on the base in one-to-one correspondence, and then directly connected with the differential charge amplifier by a commercially available connection line with a Teflon connector. The present invention is characterized in that the insulating positioning frame is provided with eight positioning holes, and the connecting lines between the centers of the positioning holes are square. Four positioning holes in them are ...

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Abstract

The invention relates to a differential piezoelectricity 3D force sensor that includes dynamometer, base and cover. Eight locating holes are set on the insulated locating frame, and the center connecting line is square. Four locating holes are located on the four foursquare of the square that is the X0 degree type quartz crystal. The X axis is plumped to the reverse axial direction of the angle wafer. The other four locating holes are in center pointer of the square, and the quartz crystal is Y0 degree type quartz crystal. The invention is simple structure, and is easy to manufacture. It could realize differential measuring to signal. It has high accuracy, and is suitable for plural occasions.

Description

technical field [0001] The invention relates to a sensor for measuring three-dimensional force in space. Background technique [0002] At present, the known piezoelectric three-dimensional force sensor is composed of a base, a cover, a quartz wafer, an electrode, an insulating positioning member, a signal lead-out socket and the like. as attached Figure 1 to Figure 5 As shown, the piezoelectric three-dimensional force sensor is installed in the base after combining three quartz wafers in such a way that the maximum sensitivity axes form a 90° angle with each other, and then the cover and the base are welded together. When a spatial force acts on the sensor, the magnitude of the three-dimensional force in space is reflected by detecting the charge output of three quartz wafers. However, this piezoelectric three-dimensional force sensor not only has a weak output signal when the external force is small, but the measurement accuracy is not high, and at the same time, it canno...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/16G01L9/08
Inventor 刘俊刘京诚秦岚李敏
Owner CHONGQING UNIV
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