System and method for controlled mixing of fluids via temperature

Abstract

Embodiments of the present invention provide a system and method for continuous flow production of mixed fluids. The mixed fluids can comprise a mixture of different fluids or a mixture of the same fluid having different input properties such as temperature. In general, two streams of fluid of varying temperature are supplied to a mixer. The flow rate of each of the input fluids can be regulated to produce a mixed fluid at a desired flow rate and temperature. As an example, mass flow controllers can regulate the flow rates of a hot and cold stream of de-ionized water to produce a stream of de-ionized water at a desired flow rate and temperature.

Description

RELATED APPLICATIONS[0001]This application is a divisional of and claims priority under 35 U.S.C. §120 to U.S. patent application Ser. No. 11 / 365,395, entitled “SYSTEM AND METHOD FOR MULTIPLEXING SETPOINTS”, by McLoughlin, filed Mar. 1, 2006, which is hereby fully incorporated by reference herein.TECHNICAL FIELD OF THE INVENTION[0002]The present invention relates to chemical delivery systems. More particularly, embodiments of the present invention relate to systems and methods for the controlled mixing of fluids.BACKGROUND[0003]Controlled composition fluids are present in a number of widely used fluids including municipal water supplies, beverages, gasoline, intravenous (“IV”) fluids and other useful fluids. In some cases, the controlled composition fluid is not the end product of a process, but is used in the manufacturing process of other products. For example, semiconductor manufacturing processes commonly use controlled composition fluids in cleaning and etching of semiconductor...

AI Technical Summary

Benefits of technology

This approach enables rapid compensation for changes in fluid properties and process parameters, increasing throughput and reducing errors associated with temperature fluctuations, thereby improving the flexibility and accuracy of fluid mixing.

Problems solved by technology

While the use of batch process allows for fairly easy control of concentration, it limits production of the blended fluid to a particular size batch.

Additionally, current batch process systems have large footprints, relatively high capital costs and a high level of complexity.

Currently continuous flow systems do not provide adequate control to compensate for inaccurate or changing component fluid properties such as concentration or temperature.

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