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Sample Stage

a technology of sample stage and sample, which is applied in the direction of basic electric elements, electrical equipment, electric discharge tubes, etc., can solve the problems of unfavorable sample movement, and achieve the effects of less noise, better contrast, and sharp images

Inactive Publication Date: 2017-11-02
PHENOM WORLD HLDG BV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Benefits of technology

This patent describes a system for positioning a sample and maintaining its stability during observation. It explains that the mechanical stiffness of the sample stage is important for achieving accurate positioning, and that displacement and rotation mechanisms can reduce the stiffness. To improve the user experience, the system includes a processor that can automatically switch between live images based on changes in the microscope's condition. This results in live images that are less affected by motion or other distortions, making them easier to observe and analyze.

Problems solved by technology

It is often undesirable that the sample moves, e.g. vibrates within the field of view during observation of the sample.

Method used

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Embodiment Construction

[0042]FIG. 1 shows a schematic representation of a system having aspects according to the invention. FIG. 1 shows, by way of non-limiting example a schematic representation of a scanning electron microscope. FIG. 1 shows a sample stage 1 positioned inside a vacuum chamber 14. The sample stage 1 includes a sample carrier 4. In this example the sample carrier 4 includes a bottom 4A and a circumferential wall 4B enclosing a cavity 18 for holding a sample or a sample holder. In this example the cavity 18 holds an exchangeable sample holder 5. The exchangeable sample holder 5 holds a sample 5A.

[0043]The sample stage 1 further includes a base 2. The sample carrier 4 is positioned on the base 2. In FIG. 1 the sample carrier 4 includes sliding feet 12 for allowing sample carrier 4 to slidingly move along the surface of the base 2. Since the sample carrier 4 directly abuts against the base 2, and here is pressed against the base by gravity, the mechanical stiffness of the sample stage 1 from...

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Abstract

Sample stage, e.g. for use in a scanning electron microscope. The sample stage includes a base, a sample carrier, and an actuator assembly arranged for moving the sample carrier in at least one direction substantially parallel to the base. The actuator assembly is arranged so as not to contribute to the mechanical stiffness of the sample stage from the sample carrier to the base.

Description

FIELD OF THE INVENTION[0001]The present invention concerns a sample stage. More specifically the invention relates to a sample stage for use in an electron microscope. The invention also relates to a vacuum system, such as for use in an electron microscope. The invention also relates to an improved load lock.BACKGROUND TO THE INVENTION[0002]Sample stages are commonly used for moving a sample relative to a reference position. The reference position can e.g. be related to a field of view of a microscope such as a scanning electron microscope. The reference position can e.g. be an optical axis or a beam position. The sample stage allows positioning and repositioning of the sample relative to the reference position, e.g. to allow inspection of certain features of the sample, or to allow inspection of a surface area larger than the field of view.[0003]A load lock forms a port between the inside atmosphere of an apparatus, such as an electron microscope, and the outside atmosphere. Load l...

Claims

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Application Information

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Patent Type & Authority Applications(United States)
IPC IPC(8): H01J37/20H01J37/18H01J37/28
CPCH01J37/20H01J37/18H01J2237/20235H01J2237/2006H01J2237/20228H01J37/28H01J37/185H01J2237/20221H01J2237/204H01J2237/28H01J2237/0216H01J2237/184H01J37/261
Inventor STAMSNIJDER, GERHARDUS BERNARDUSVAN DEN BOS, PAUL CORNELIS MARIAKLUIJTMANS, TON ANTONIUS CORNELIS HENRICUSSTOKS, SANDER RICHARD MARIEHAMMEN, ADRIANUS FRANCISCUS JOHANNESVAN DER MAST, KAREL DIEDERICK
Owner PHENOM WORLD HLDG BV
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