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Micro-stretching sample structure with elastic beam

A tensile specimen and micro-stretching technology, applied in the directions of strength properties, measuring devices, instruments, etc., can solve the problems of increasing the difficulty of micro-fabrication of test structures, sample calibration and displacement calibration, etc., and reduce torsion and displacement. The effect of bending deformation

Inactive Publication Date: 2007-07-11
DALIAN UNIV OF TECH
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  • Description
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Problems solved by technology

Another method is to adopt an integrated test structure, that is, the driver and the sample are processed in the same chip, which avoids the clamping and positioning of the sample; but its biggest disadvantage is that it greatly increases the difficulty of micromachining the test structure.
Haque.M.A et al. proposed a tensile test structure of an integrated force sensor driven by an external piezoelectric force, in which a support beam was added to reduce the non-axial deformation of the sample, but due to the existence of the tensile force borne by the support beam , the tensile force acting on the sample needs to be measured inside the test structure, and it is difficult to calibrate the force and displacement on the sample

Method used

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  • Micro-stretching sample structure with elastic beam
  • Micro-stretching sample structure with elastic beam
  • Micro-stretching sample structure with elastic beam

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Embodiment Construction

[0014] In conjunction with accompanying drawing 1, accompanying drawing 2, accompanying drawing 3 describe in detail the specific implementation of the present invention, when the micro-tensile sample structure of additional elastic beam is body micro-tensile sample structure, there is large-area flat plate in the middle part of its elastic support beam 3. One end is connected to the tensile sample 2, the other end is connected to the loading end 4, and the two sides are connected to linear elastic beams 5, 6, 7, 8. The connection point between the tensile sample 2 and the large-area flat plate 3 is close to the geometric center of the linear elastic beam. When doing the tensile test, the fixed end 1 in the micro-tensile sample structure is fixed on the static stage, the loading end 4 is fixed on the moving stage, the marking beam 5 is cut off, and the Tensile specimen. Under the action of linear elastic beams 5, 6, 7, 8, when the total loading force is at an angle of 5° to t...

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Abstract

The invention relates to the affix elastic beam micro tensile specimen. It comprises the fastening end, tensile specimen, elastic support, and loading end. The elastic support is axial symmetrical, with a big plat board in the middle, on end connected to the specimen, the other extended to the loading end, with flexible beam at both sides. The overall structure uses MEMS microprocessing, free from assembly, with effective reduction of specimen clamping, improving precision and reliability.

Description

technical field [0001] The invention relates to a micro-tensile sample structure with an additional elastic beam, which belongs to the field of mechanical performance testing application components in the field of micro-electromechanical systems. Background technique [0002] The development of mechanical performance testing technology in MEMS lags far behind other technologies in the field of MEES. Diversified and complex. These factors require higher detection accuracy of the micro-scale mechanical quantities. Conventional mechanical testing methods include micro-tensile method, micro-beam bending method, nano-indentation method and micro-beam vibration method. Strong versatility and other advantages; it can measure elastic modulus, Poisson's ratio, yield strength and fracture strength. The uniaxial tensile method has become one of the most commonly used testing methods for testing mechanical properties at the microscale. However, due to the size of the sample at the m...

Claims

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Application Information

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IPC IPC(8): G01N3/00
Inventor 褚金奎张段芹沈洪源关乐王晓东
Owner DALIAN UNIV OF TECH
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