Organic material evaporation source and organic vapor deposition device
An organic material, evaporation source technology, applied in vacuum evaporation coating, lighting devices, electroluminescent light sources, etc., can solve the problem that the evaporation source is difficult to accurately control the heating temperature and evaporation speed, the responsiveness is not enough, and the evaporation source is difficult to obtain film. Thickness distribution and other issues, to achieve good control of heating temperature and evaporation rate, uniform film thickness distribution, and good responsiveness
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[0072] As an example, the above-mentioned evaporation source was used, and as a comparative example, a Knudsen cell was used, and evaporation was performed under the same conditions. The results are shown in FIGS. 5 and 6 .
[0073] From Fig. 5 and Fig. 6, compared with the comparative example shown in Fig. 6, the embodiment shown in Fig. 5 can accurately and responsively control the heating temperature and the evaporation rate. As a result, it is possible to use about 1 / 2 time to complete processing.
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