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Macro inspection apparatus and macro inspection method

A macroscopic inspection and macroscopic technology, applied in the direction of measuring devices, testing of machines/structural components, instruments, etc., can solve problems such as difficulties in implementation

Inactive Publication Date: 2007-01-31
OLYMPUS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In particular, in order to realize a macroscopic inspection device that uses a multi-joint arm manipulator as a substrate holder driving mechanism, supports the substrate holder cantilevered by the multi-joint arm manipulator, and makes the substrate holder stand up at a predetermined angle for visual inspection. In this case, due to the large load applied to the multi-joint arm manipulator, it is difficult to realize
In addition, when the size of the substrate holder increases, the space for swinging the substrate holder must also increase, so there is a problem of increasing the size of the device

Method used

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  • Macro inspection apparatus and macro inspection method
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  • Macro inspection apparatus and macro inspection method

Examples

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no. 1 Embodiment approach

[0090] figure 1 It is a side view showing a schematic configuration of the macroscopic inspection device according to the first embodiment of the present invention.

[0091] The macro-inspection device 1 is arranged in a clean room, and has a device main body 2 having a side wall surrounding a space opened above and below. On the upper surface of the apparatus main body 2 , a filter (not shown) for improving the degree of purification in the apparatus main body 2 is attached. In addition, on the upper part of the device main body 2, as a macroscopic illumination optical system, for example, a light source 3 for macroscopic illumination such as a metal halide lamp or a sodium lamp, and a reflector provided on the optical axis of the illumination light emitted from the light source 3 are provided. 4. Below the reflecting mirror 4, a Fresnel lens 5 is arranged that collects the illumination light from the light source 3 and guides it onto the substrate W. As shown in FIG. The ...

no. 2 Embodiment approach

[0121] Next, a second embodiment of the macroscopic inspection device of the present invention will be described with reference to the drawings. In addition, the same reference numerals are assigned to the same constituent elements as those of the first embodiment described above, and description thereof will be omitted.

[0122]Such as Figure 6 As shown, on the upper surface of the long side portion 7a of the holder main body 7 of the front end arm 16 of the inspection manipulator 15, two reference pins 42a are fixed as reference positioning units (reference substrate positioning mechanisms). A reference pin 42b is fixed to the upper surface of the side portion 7c. Each reference pin 42a is arranged at a position corresponding to a corner portion of the substrate W, and each reference pin 42b is arranged at a position corresponding to a center portion of the left side of the substrate W. As shown in FIG.

[0123] On the device main body 2, a frame 44 and a frame 45 are ins...

no. 3 Embodiment approach

[0141] Next, a third embodiment of the macroscopic inspection device of the present invention will be described with reference to the drawings. In addition, the same reference numerals are assigned to the same constituent elements as those of the first embodiment described above, and description thereof will be omitted.

[0142] In the present embodiment, a multi-joint arm robot for inspection (the robot for inspection 15 ) is used as a substrate holder drive mechanism for rotating and swinging the substrate holder 6 . Furthermore, in order to make the substrate holder 6 supported freely rotatably and swingably by the inspection manipulator 15, to come to rest quickly at the substrate delivery position, to smoothly perform delivery of the substrate W, to shorten the tact time, and to improve the inspection efficiency, there are Stationary mechanism 50 . Except for the provision of the stationary mechanism 50, it is the same as the above-mentioned first embodiment, and repeate...

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Abstract

A macro inspection apparatus having: a substrate holder that holds a substrate to be inspected; a macro illumination optical system that irradiates illumination light onto the substrate; a substrate holder driving mechanism that supports the substrate holder, Simultaneously, in the state where the substrate is irradiated with the illumination light, the posture of the substrate holder is controlled; a substrate conveyance mechanism that transfers the substrate to and from the substrate holder; a substrate floating mechanism , which floats the substrate from the substrate holder by spraying air on the substrate transferred to the substrate holder; a substrate positioning mechanism that makes the substrate float by the substrate floating mechanism and a substrate fixing mechanism that fixes the substrate positioned by the substrate positioning mechanism on the substrate holder.

Description

technical field [0001] The present invention relates to a macroscopic inspection device used for visual inspection of large substrates such as glass substrates, and a macroscopic inspection method using the macroscopic inspection device. [0002] This application takes Japanese Patent Application No. 2004-279990, Japanese Patent Application No. 2004-279991, and Japanese Patent Application No. 2004-279992 as basic applications, and uses their contents. Background technique [0003] In the manufacturing process of flat panel displays (FPD) such as liquid crystal displays (LCD), there is a visual inspection (macroscopic inspection) of the appearance of a transparent substrate (such as a main glass substrate; hereinafter referred to simply as a glass substrate) manufactured in each manufacturing process inspection process. In this inspection process, a substrate appearance inspection device is used which can perform inspection on the glass substrate by irradiating macroscopic i...

Claims

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Application Information

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IPC IPC(8): G01N21/84G02F1/13G01M11/00
CPCG01N21/84G01M11/00G01N2021/9513G02F1/13G02F1/1309
Inventor 冈平裕幸藤崎畅夫加藤洋
Owner OLYMPUS CORP
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