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Basal lamina determination device

A technology for measuring devices and substrates, applied in measuring devices, optical testing of flaws/defects, material analysis through optical means, etc., can solve problems such as adjusting the deformation of the shooting mechanism, display device and workbench, to prevent dumping and support easily , the effect of stabilizing support

Inactive Publication Date: 2006-12-06
SCREEN HLDG CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
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AI Technical Summary

Problems solved by technology

In this inspection device, there is no problem when the liquid crystal display device (substrate) is relatively small, but when the liquid crystal display device is large in size, the liquid crystal display device and the workbench will be deformed, so there is a relative disadvantage that the imaging mechanism must be adjusted. location problem

Method used

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  • Basal lamina determination device
  • Basal lamina determination device
  • Basal lamina determination device

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Embodiment Construction

[0031] Hereinafter, embodiments of the present invention will be described based on the drawings. figure 1 It is a front view of a length measuring instrument as a substrate measuring device according to the present invention, figure 2 is its side view, image 3 is its top view. In addition, in image 3 Only the main parts of the first supporting member 11 and the stage portion 15 are shown in the figure, and other members are omitted.

[0032] This length measuring instrument has: a base 10 composed of a first support member 11, a second support member 12, and a base member 13; a stage portion 14 supported by the base 10; A stand 15 movable in the left and right directions; an imaging unit 18 composed of a photographing unit 16 and a moving member 17 connected to each other and movable in an up and down direction along the stand 15 .

[0033] Also, in this specification, as from Figure 1 to Figure 3 As shown, a three-dimensional coordinate system with the surface of th...

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Abstract

The invention provides a base plate measuring device. Which can rightlt measure enlarged base plate. The metroscope comprise: pedestal (10); objective table (14), which is not stressed by pedestal but is supported by pedestal with its surface inclined a minute angle in relative to vertical direction; guide roller (42) and depressing roll (43), which supports lower part of measured base plate (100); platform (15), which is guided by rail (45) installed on upper and lower of objective table, and moves right and left along objective table surface; camera (18), guided by rail (53) set on platform and move up and down along platform.

Description

technical field [0001] The present invention relates to a substrate measuring device for measuring substrates such as mask substrates used for producing printed circuit boards and glass substrates for liquid crystal display panels. Background technique [0002] As one of such substrate measuring devices, a length measuring instrument for measuring the distance between two points on the substrate surface has been used (see Patent Document 1). Such a length measuring instrument adopts a structure in which an imaging unit movable in the X and Y directions is provided along the surface of the stage on which the substrate is mounted, and the imaging unit is used to image the surface of the substrate. The movement amount of the imaging unit at two points is used to measure the distance between the two points. [0003] However, with the increase in the size of the substrate in recent years, the above-mentioned length measuring instrument has a problem that the substrate placed on ...

Claims

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Application Information

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IPC IPC(8): G01B21/00
CPCG01N21/8806G01N21/95G01N2021/9513H01L21/6838H01L21/68778
Inventor 山下浩山下典良
Owner SCREEN HLDG CO LTD
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