Interference scanning device and method

Abstract

This invention discloses a interference scanning device, which is an improved structure on the basis of a reflector, the individual zones of the reflector have different optical paths and each zone gets its own optical path interference information of every instant and sums up the information to find out the instant information specific being tested positions with the help of computing the moving rate of the interfere unit to simulate the up-down measurement to said positions. Each time when measuring, the interference scan device only needs to shift the interfere unit horizontally at the same height to obtain the measured result of the interferometer.

Description

technical field [0001] The present invention relates to an interference scanning device and method, in particular to a profile scanning device and method that uses a step-shaped lens to generate an optical path difference to achieve the optical path change effect of an interferometer. Background technique [0002] With the advancement of technology and the improvement of manufacturing process, the line width of semiconductor, flat panel display, micro-electromechanical, optical communication and other fields has been decreasing year by year, and the number of components per unit volume has grown rapidly. Especially the application of nanotechnology has pushed the manufacturing process to a new level. Realm; as the size of the manufacturing process shrinks, it becomes more and more difficult to control the quality. Taking the thin film transistor-liquid crystal display manufacturing process as an example, the amount of liquid crystal in the manufacturing process is controlled ...

AI Technical Summary

Problems solved by technology

[0005] However, as mentioned above, because each detection can only be measured for the area covered by the object beam 300, and each measurement needs to wait for the mechanical lifting of the interferometer 8, so it takes a lot of time to measure each area to be measured. considerable time

When the area of ​​the object to be measured is large and cannot be fully covered by a single object beam 300, it is necessary to measure in different areas; especially if the area covered by the object beam 300 is much smaller than the size of the object to be measured, such as the current glass substrate for liquid crystal displays, if it is true Detecting the height of its surface topography area by area will inevitably seriously delay the speed of product shipment

[0006] Therefore, the current actual detection process is only as follows Figure 4 As shown, detection is performed at a few specific positions 71 on the surface 70 of the entire glass substrate 7 (marked by dotted lines). As for areas outside the area 71 marked by dotted lines, a small number of data are used to estimate, resulting in great uncertainty in the manufacturing process. , which greatly affects the quality

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