Process for making tripolar carbon nanotube field emission display having self-aligning technique

Abstract

This invention relates to carbon nanometer tube negative electrode structure eradiation display device, wherein, the display comprises negative panel, positive panel and glass closure frame formed sealed vacuum chamber, wherein, the positive panel is grown with carbon nanometer negative electrode located on the top of the negative electrode to control the electron eradiation control grid electrodeand adopts self-aligning process.

Description

technical field [0001] The invention belongs to the intersecting fields of vacuum science and technology, nanometer science and technology and microelectronics science and technology, and relates to the manufacture of flat panel display devices, in particular to the content of device manufacture of a field emission display of carbon nanotube cathodes, in particular A three-pole structure carbon nanotube field emission display with a self-alignment process and a manufacturing process thereof are disclosed. Background technique [0002] At present, for field emission flat panel display devices fabricated by using carbon nanotubes as cathode materials, the cathode fabrication processes are various and different. The field emission characteristics of carbon nanotube cathodes prepared by the growth process are better than those of carbon nanotube cathodes prepared by other implantation methods, but are limited by the characteristics of other structures of the device, such as the ...

AI Technical Summary

Problems solved by technology

In the device manufacturing process of flat-panel devices, limited by the actual process manufacturing accuracy and actual equipment level, there is always a certain alignment error between the preparation of carbon nanotube cathode strips and the cathode conductive strips, while the control grid strips and There is also a certain alignment error between the carbon nanotube cathode strips

On the one hand, although these can be controlled within the allowable range in actual device fabrication, how can we minimize the negative impact of alignment errors and produce devices with higher precision and better field emission performance? On the other hand, in the manufacturing process of large-area devices, once there is an alignment error in a certain part of the device, it will cause the failure of the overall device. For example: due to alignment errors, a certain The control grid bar and the carbon nanotube cathode bar are connected to each other, so that the control grid cannot effectively control the carbon nanotube cathode; due to misalignment, there is only A small number of parts overlap, so that only a small part of the carbon nanotube cathode can be applied with voltage, and most of the carbon nanotube cathode is in a floating state, which not only wastes a lot of carbon nanotube cathode materials, but also improves the field emission performance of the device. A sharp decrease, etc., will result in a very low device manufacturing success rate, and the device manufacturing cost will be greatly increased, which is contrary to the requirement to reduce the device manufacturing cost as much as possible

In addition, in the process of device manufacturing, the accuracy requirements of equipment and manufacturing process will be correspondingly improved, which will further increase the manufacturing cost of devices virtually.

For how to effectively and fully utilize the good field emission characteristics of grown carbon nanotube cathodes, avoid the influence of other processes on carbon nanotube cathodes, and at the same time simplify the device manufacturing process, improve the success rate of device manufacturing, and reduce device manufacturing costs , so that the manufacturing process of the overall device tends to be simplified, reducing the material requirements for making device materials. At present, there is no effective solution

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