Anti-radiation electric field microsensor
A micro-sensor, anti-radiation technology, applied in electrostatic field measurement and other directions, can solve the problems of poor reliability, low resolution, difficult packaging of movable structures, etc., to achieve the effect of improving reliability
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[0011] A radiation-resistant electric field microsensor for collecting electric field signals, comprising a p-type substrate 1, a hole 6 is arranged at the bottom of the p-type substrate 1, and a hole 6 (about 0.1 μm) is arranged on the upper surface of the p-type substrate 1 n-type silicon 2, two heavily doped n-type contact regions 3 are implanted on the n-type silicon 2, an n-type channel 7 is arranged between the two n-type contact regions 3 and the two n-type contact regions 3 Connected by n-type channel 7, on the n-type contact region 3 and n-type channel 7 (about 50nm) SiO 2 Layer 4 is provided with a metal lead 5 on the heavily doped n-type contact region 3 .
[0012] After the two n-type heavily doped contact regions of the present invention are applied with a voltage, when there is an external electric field incident on the n-type channel of the electric field microsensor, the carriers (electrons) in the channel will increase accordingly, thereby making the channel ...
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