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Planar three freedom meek precisively positioning platform

A precision positioning, degree of freedom technology, applied in the direction of workbench, machine/support, large fixed members, etc., can solve the problems of poor platform stability, complex processing, difficult to improve positioning accuracy to sub-micron level, etc., to achieve high Effects of stability, improved straightness, high precision and stability

Inactive Publication Date: 2005-07-27
SOUTH CHINA UNIV OF TECH
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Problems solved by technology

[0002] At present, the transmission pairs of precision positioning platforms mostly use traditional mechanical structures. Therefore, there are inevitably gaps and frictions, and it is difficult to improve the positioning accuracy to the sub-micron level; in recent years, high-precision three-degree-of-freedom positioning platforms Most of the upper and lower platforms are used to achieve sub-micron positioning, but the processing is complicated and the stability of the platform is not good

Method used

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  • Planar three freedom meek precisively positioning platform

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Embodiment Construction

[0012] In order to better understand the present invention, the present invention will be further described below in conjunction with the accompanying drawings.

[0013] figure 1 It is a structural schematic diagram of the flat three-degree-of-freedom flexible precision positioning platform of the present invention except the controller. Such as figure 1 As shown, the planar three-degree-of-freedom compliant precision positioning platform of the present invention includes an output platform 20, a base 1, three compliant mechanisms 5, 6 and 7, three piezoelectric drivers 2, 3 and 4, and three driver positioning devices 11 , 12 and 13, three displacement sensors 8, 9 and 10, also includes a controller.

[0014] The output platform 20 is connected to the base 1 through three compliance mechanisms 5, 6, and 7; the piezoelectric driver 2 is connected to the base 1 through the driver positioning device 11, and there is a gap or close contact between the front end and the complianc...

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Abstract

A precise positioning platform consists of output platform, base, three gentle and agreeable mechanisms, three piezoelectric drivers, three positioning devices, three displacement sensors and controllers. It is featured as arranging mechanism and sensors in 120 degree angle towards outside along output platform to ensure precision, stability and linearity of movement and to provide translation in X and Y direction as well as rotation in Z direction, using drivers to ensure quick response speed for achieving nanoresolution and subnauoprecision of positioning.

Description

technical field [0001] The invention belongs to a precision positioning platform, in particular to a flat three-degree-of-freedom flexible precision positioning platform. Background technique [0002] At present, the transmission pairs of precision positioning platforms mostly use traditional mechanical structures. Therefore, there are inevitably gaps and frictions, and it is difficult to improve the positioning accuracy to the sub-micron level; in recent years, high-precision three-degree-of-freedom positioning platforms The upper and lower platforms are often used to achieve sub-micron positioning, but the processing is complicated and the stability of the platform is not good. Contents of the invention [0003] In order to achieve extremely high precision and easy-to-process characteristics at the same time, the present invention provides a flat three-degree-of-freedom flexible precision positioning platform, which c...

Claims

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Application Information

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IPC IPC(8): B23Q1/64B25H1/00F16M11/20G12B5/00
Inventor 张宪民王华欧阳高飞邓俊广卢盛林
Owner SOUTH CHINA UNIV OF TECH
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