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Piezoelectric body, manufacturing method thereof, piezoelectric element having piezoelectric body, inkjet head and inkjet type recording device

A manufacturing method and piezoelectric body technology, applied in the manufacture/assembly of piezoelectric/electrostrictive devices, piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, etc., can solve Deterioration and other issues

Inactive Publication Date: 2010-10-06
PANASONIC CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] However, in the Pb-excess piezoelectric body as described above, there is still room for improvement due to the fear of deterioration under high humidity.

Method used

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  • Piezoelectric body, manufacturing method thereof, piezoelectric element having piezoelectric body, inkjet head and inkjet type recording device
  • Piezoelectric body, manufacturing method thereof, piezoelectric element having piezoelectric body, inkjet head and inkjet type recording device
  • Piezoelectric body, manufacturing method thereof, piezoelectric element having piezoelectric body, inkjet head and inkjet type recording device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0049] figure 1 with figure 2 A piezoelectric element representing a piezoelectric body 3 according to an embodiment of the present invention, the piezoelectric element includes a first electrode 2 provided on a substrate 1, the above-mentioned piezoelectric body 3 provided on this first electrode 2, and a piezoelectric body provided on this piezoelectric element. The second electrode 4 on the electric body 3.

[0050] The above-mentioned substrate 1 is made of, for example, silicon (Si) with a thickness of 0.2 mm, and the above-mentioned first and second electrodes 2 and 4 are made of, for example, platinum (Pt) with a thickness of 0.1 μm.

[0051] The above-mentioned piezoelectric body 3 is made of a piezoelectric material mainly composed of lead (Pb), zirconium (Zr) and titanium (Ti), and has a general formula ABO 3 This shows a perovskite crystal structure in which the main component of point A is Pb, and the main components of point B are Zr, Ti, and Pb. That is to s...

Embodiment approach 2

[0086] Figure 5 with Image 6 Indicates an inkjet head according to an embodiment of the present invention. This inkjet head includes a plurality of piezoelectric bodies 13 similar to those described in Embodiment 1 above, and a pair of first piezoelectric bodies 13 respectively provided on both sides in the thickness direction of the piezoelectric body 13. As well as the second electrodes 12 and 14 (the same as the first and second electrodes 2 and 4 described in Embodiment 1), the electrode on this side (the first electrode 12) on the opposite side to the piezoelectric body 13 The vibrating plate 15 provided on one side (lower surface) and the pressure chamber member 16 for forming the pressure chamber 20 for containing ink are joined to the surface (lower surface) of the vibrating plate 15 opposite to the first electrode 12 . In this embodiment, the plurality of piezoelectric bodies 13 are provided at 200 per inch.

[0087] The vibrating plate 15 is made of silicon oxide...

Embodiment approach 3

[0098] Figure 7 An inkjet recording device according to an embodiment of the present invention is shown, and this inkjet recording device has the same inkjet head 28 as that in Embodiment 2 described above. The structure is such that, in this inkjet head 28, the pressure is applied from the nozzle hole (nozzle hole 23 in the above-mentioned embodiment 2) provided to communicate with the pressure chamber (the pressure chamber 20 in the above-mentioned embodiment 2). The ink in the chamber is ejected onto the recording medium 29 (recording paper or the like) to perform recording.

[0099] The above-mentioned inkjet head 28 is mounted on a holder 31 provided on a holder shaft 30 along the main scanning direction X. . Thus, the carriage 31 constitutes a relative movement device for relatively moving the inkjet head 28 and the recording medium 29 along the main scanning direction X. As shown in FIG.

[0100] This inkjet recording device has a plurality of rollers 32 for moving ...

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Abstract

In a piezoelectric element comprising a first electrode (2) provided on a substrate (1), a piezoelectric material (3) provided on the first electrode (2) and a second electrode (4) provided on the piezoelectric material (3), the piezoelectric material (3) is configured so as to have a perovskite type crystal structure which is represented by a formula ABO3 and in which the main component for the A site is Pb and the main components for the B site are Zr, Ti and Pb, and configured so that a ratio of Pb atoms to all atoms in the B site is more than 3% and not more than 30%. Namely, the piezoelectric material (3) is formed so as to contain Pb excessively and the excess Pb atoms are activated to be Pb<4+> during formation of the piezoelectric material (3) and then introduced into the B site.

Description

technical field [0001] The present invention relates to the technical fields of a piezoelectric body having a perovskite crystal structure, a manufacturing method thereof, a piezoelectric element having the piezoelectric body, an inkjet head, and an inkjet recording device. Background technique [0002] In recent years, there have been strong demands for miniaturization, energy saving, and high-speed drive for machines with piezoelectric bodies such as micro pumps, micro speakers, micro switches, and inkjet heads. In order to meet these demands, piezoelectric bodies are being made into It is smaller than the conventionally used sintered body and can be formed on a thin film. Therefore, in such a thin-film piezoelectric body, research and development aimed at improving the piezoelectric characteristics have been extensively carried out. For example, in JP-A-2000-299510, it is disclosed that a perovskite containing Pb, Zr, and Ti as main components In the piezoelectric body w...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/187B41J2/135B41J2/14B41J2/16C01G21/00C01G25/00C04B35/491C23C14/08H01L41/09H01L41/22H01L41/316H01L41/39
CPCH01L41/0926C04B2235/79B41J2/1645C23C14/088C04B2235/787C04B2235/3227B41J2/1631B41J2/1628C04B2235/3296B41J2/1646H01L41/0973H01L41/187C01P2002/34C01G21/00C04B35/491C01G25/006B41J2/161C04B2235/3213C04B2235/768C01P2006/40H10N30/2047H10N30/853C04B35/49
Inventor 神野伊策松永利之鎌田健原慎太郎
Owner PANASONIC CORP
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