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Universal silicon product processing turntable structure

A general-purpose, product-based technology, applied in final product manufacturing, sustainable manufacturing/processing, climate sustainability, etc., can solve the problem of inability to adapt to multi-category products, frequent replacement of silicon component product categories, and difficulty in fixed processing methods. Timely adjustment and other issues to achieve the effect of shortening the switching cycle, good versatility and improving economic benefits

Pending Publication Date: 2022-05-31
ハンチョウダニュアンジャクシンセミコンダクターテクノロジーカンパニーリミテッド
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] At present, the processing output of etching equipment parts in the semiconductor industry is rapidly increasing, but the frequent replacement of silicon parts will lead to the problem that the fixed processing method is difficult to adjust in time. The general turntable device used in the processing of ring-shaped and pie-shaped silicon parts The vacuum suction ports are all customized, and there is no way to adapt to multi-category products

Method used

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  • Universal silicon product processing turntable structure
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  • Universal silicon product processing turntable structure

Examples

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Embodiment 1

[0025] Example 1: A general-purpose silicon product processing turntable structure (see attached figure 1 , attached figure 2 , attached image 3 ), including a turntable 1, a plurality of vacuuming grooves 2 are arranged on the upper surface of the turntable at radial intervals, a suctioning hole 3 is arranged in the vacuuming groove, and a ventilation interface 4 is arranged in the middle of the turntable, and the suctioning holes are connected with the ventilation interface. The vacuuming groove is of annular structure, the turntable is provided with a plurality of fixture fixing holes 5 arranged at radial intervals, and the fixture fixing holes are provided with several circles. The upper surface of the turntable is a plane structure. Two air extraction holes are evenly arranged in each vacuum extraction tank.

[0026] A connecting plate 6 is fastened in the middle of the turntable, and the ventilation interface is arranged on the connecting plate. The connecting plate...

Embodiment 2

[0028] Example 2: A general-purpose silicon product processing turntable structure (see attached Figure 4 ), its structure is the same as that of Embodiment 1, the main difference is that in this embodiment, the turntable includes a disc base 15 and a plurality of disc bodies 16 mounted on the disc base. The vacuum groove is provided on the upper surface of the disc body. The disc base and the disc body are provided with radially arranged slide rails 17 , and the disc body and the slide rail are provided with slide grooves correspondingly, and the slide grooves are adapted and connected to the slide rails. A locking screw 18 is installed on the disc body, and the locking screw abuts on the slide rail. A connecting plate is fastened in the middle of the plate seat, the ventilation interface is arranged on the connecting plate, the slide rail is provided with a guide hole, the connecting plate and the slide rail are provided with a number of communication holes one by one, and...

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Abstract

The invention discloses a universal silicon product machining rotary table structure and aims to overcome the defect that a silicon product machining rotary table is poor in universality. The device comprises a rotating disc, a plurality of vacuumizing grooves are radially formed in the upper surface of the rotating disc at intervals, air exhaust holes are formed in the vacuumizing grooves, a ventilation connector is formed in the middle of the rotating disc, and the air exhaust holes are communicated with the ventilation connector. The universal silicon product machining rotary table structure can adapt to machining of various silicon component products of different types, is good in universality, and facilitates shortening of the product switching period and improving of economic benefits.

Description

technical field [0001] The present invention relates to a semiconductor processing technology, more particularly, to a general-purpose silicon product processing turntable structure. Background technique [0002] At present, the processing output of etching equipment components in the semiconductor industry is increasing rapidly, but the frequent replacement of silicon components makes it difficult to adjust the processing method in time. The general turntable device used in the processing of annular and pie silicon components The vacuum suction mouths are all customized, and there is no way to adapt to multiple categories of products. SUMMARY OF THE INVENTION [0003] In order to overcome the above deficiencies, the present invention provides a general-purpose silicon product processing turntable structure, which can adapt to the processing of a variety of different types of silicon component products, has good versatility, is conducive to shortening product switching cyc...

Claims

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Application Information

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IPC IPC(8): H01L21/683
CPCH01L21/6838Y02P70/50
Inventor 赵佑晨叶天爱李长苏
Owner ハンチョウダニュアンジャクシンセミコンダクターテクノロジーカンパニーリミテッド
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