Transducer unit, transducer array, preparation method and energy equipment

Abstract

The invention discloses a transducer unit, an array, a preparation method and energy equipment, the transducer unit comprises a substrate structure and a vibration structure, and the vibration structure comprises a central structure; the ring structure is provided with a gap in a closed mode in the circumferential direction, the gap penetrates through a main body of the ring structure in the direction perpendicular to the circumferential direction, the center structure is arranged in the gap of the ring structure, and a gap is formed between the center structure and the ring structure; the first connecting structure is connected with the central structure and the ring structure; the center structure and the ring structure are both of a multi-layer structure, the center structure and the ring structure are each sequentially provided with at least a second electrode layer, a piezoelectric layer and a first electrode layer in the direction deviating from the substrate structure, and the area of the first electrode layer in the center structure is not larger than that of the piezoelectric layer. According to the invention, the vibration film structure of the transducer is optimized, so that the performances in the aspects of sensitivity, propagation distance, output and the like are effectively improved.

Description

technical field [0001] The present invention relates to microelectronic system technology, in particular to a transducer unit, an array, a preparation method and an energy device. Background technique [0002] Piezoelectric ultrasonic transducer is a kind of mutual conversion of electrical energy and mechanical energy, and then realizes the function of ultrasonic transmission and reception. Traditional ultrasonic transducers mostly use mechanical processing, but such transducers are relatively bulky, have high power consumption, and are not easy to integrate. Microelectromechanical ultrasonic transducers are divided into piezoelectric type and capacitive type. Capacitive ultrasonic transducers require DC bias voltage to work. For traditional piezoelectric ultrasonic transducers with parasitic capacitance, the sound speed of the material is low, which leads to the overall mechanism. The acoustic sensitivity of the transducer is low, and the gap between the impedance and the ...

AI Technical Summary

Problems solved by technology

[0005] The object of the present invention is to provide a transducer unit, an array, a preparation method and an energy device, aiming at the problem of the microcomputer piezoelectric ultrasonic transducer in the prior art, which is limited by the small area of ​​the vibrating membrane, thereby improving the vibration The structure of the thin film, thus effectively improving the performance of the transducer

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