Novel ultra-low pressure cavity type sensor

Abstract

A novel ultra-low pressure cavity type sensor disclosed by the present invention comprises a gas inlet mechanism, a detection mechanism and a processing mechanism, the detection mechanism is fixedly installed at the top of the gas inlet mechanism, the gas inlet mechanism is used for external gas input, the detection mechanism is used for detecting whether an external to-be-detected component leaks, and the processing mechanism is used for processing the external to-be-detected component. One end of the detection mechanism is electrically connected with the processing mechanism, and the processing mechanism is used for receiving and processing a leakage signal of a to-be-detected component. The device is high in measurement precision, sensitive in response and high in precision, the testing speed can be greatly increased, the testing time can be shortened, automatic leakage detection can be achieved, high pressure can be resisted, the device can be integrated to a clamp and other automatic equipment, the device can effectively work in a harsh production environment, the flow rate of 0.01 cc / min can be accurately provided through several seconds of testing time, and the testing precision is high. And a high-precision test result that the pressure is attenuated by 0.1 Pa is obtained.

Description

technical field [0001] The invention relates to the technical field of ultra-low air pressure sensors, in particular to a novel ultra-low air pressure cavity sensor. Background technique [0002] When manufacturing machinery and equipment such as automobiles, aviation, electronics, medical equipment, refrigeration equipment, household appliances, and gas equipment, it is necessary to test the airtightness of the parts inside the device to ensure that the produced machine parts are suitable for use and safety When testing the airtightness of the device, an airtight leak detector device should be used for testing. [0003] However, the existing detection equipment cannot accurately detect the slight leakage of components, and in the fields of automobile and aviation, small gas leakage will cause great safety hazards, and the detection efficiency of the existing sensor detection equipment is relatively slow, and the gas flow test The accuracy is relatively low, so we propose a...

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Problems solved by technology

[0003] However, the existing detection equipment cannot accurately detect the slight leakage of components, and in the fields of automobile and aviation, small gas leakage will cause great safety hazards, and the detection efficiency of the existing sensor detection equipment is relatively slow, and the gas flow test The accuracy is relatively low, so we propose a new type of ultra-low air pressure cavity sensor

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