Magnetic suspension sample rack vehicle guiding device for coating equipment and coating equipment

Abstract

The invention provides a magnetic suspension sample rack vehicle guide device for coating equipment, which relates to the technical field of film optical processing, and comprises a magnetic guide rail and a magnetic guide slide block, the magnetic guide rail and the magnetic guide slide block form a magnetic suspension guide rail kinematic pair, and the magnetic guide rail is used for being fixedly arranged at the top of a coating cavity. The magnetic guide sliding block is fixedly arranged at the top of the sample rack vehicle and can move along the magnetic guide rail under the action of magnetic force; the invention further provides coating equipment, the coating equipment comprises a coating cavity, a sample rack vehicle, a bottom guide rail and the magnetic suspension sample rack vehicle guiding device for the coating equipment, the sample rack vehicle and the bottom guide rail are arranged in the coating cavity, the sample rack vehicle can move along the bottom guide rail, the magnetic guide rail is fixedly arranged at the top of the coating cavity, and the magnetic suspension sample rack vehicle can move along the bottom guide rail. The magnetic guide sliding block is fixedly arranged at the top of the sample rack vehicle; according to the scheme provided by the invention, the coating effect can be improved.

Description

technical field [0001] The invention relates to the technical field of thin film optical processing, in particular to a magnetic levitation sample rack vehicle guide device for coating equipment and coating equipment. Background technique [0002] In traditional coating equipment, there are mostly two ways to fix the sample substrate rack: the first is that the bottom of the sample rack cart is vertically fastened to the flat plate, and the top is not fixed. The sample rack car has no resistance above it during the moving process. Its advantage is that the sample rack car is only dragged by the chain and has no other resistance during the moving process of the stepping motor or servo motor, and it runs smoothly at low speed. The disadvantage is that when the sample rack is large and high, if it moves at high speed during the coating process, since the center of gravity of the sample rack is far away from the substrate and its position is high, it will inevitably shake due to...

AI Technical Summary

Problems solved by technology

The disadvantage of this fixing method is also relatively obvious. The pulley itself has a roller, and the smoothness of the rolling will decrease significantly after long-term operation. At this time, the frictional resistance to the sample rack car will be greatly increased. The existence of the roller Although the distance difference between the target gun and the target gun is guaranteed, due to the frictional resistance of the rollers in the direction of the motion axis, there will be a situation of staggered front and back precession, which will affect the uniformity of the coating. Therefore, a new solution is urgently needed to solve this problem. above question

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