Capacitive two-dimensional force sensor

Abstract

The invention belongs to the technical field of sensors, and particularly relates to a capacitive two-dimensional force sensor which is mainly used for increasing the response speed and achieving digital output of the sensor by detecting capacitance. The device comprises a strain structural body, the strain structural body comprises a fixed shell arranged on the periphery, a strain table arranged in the center and a plurality of elastic pieces connected between the strain table and the fixed shell, the device further comprises a circuit integrated board arranged at the lower ends of the elastic pieces, and the circuit board comprises a conductive plane. The plurality of elastic pieces and the single conductive plane form a plurality of groups of detection capacitors; the circuit board is integrated with a capacitance detection module which is used for detecting a capacitance change value of a detection capacitor; the processing module is used for processing the capacitance change value into a digital signal; and the communication module is used for outputting the digital signal to a client. The operation of arranging a plurality of fixed polar plates for a plurality of elastic pieces serving as movable polar plates in a matched manner is reduced, and the manufacturing is time-saving and labor-saving.

Description

technical field [0001] The invention belongs to the technical field of sensors, and specifically relates to a capacitive two-dimensional force sensor, which is mainly used to improve the response speed and realize digital intelligence of the sensor by detecting capacitance changes and digital output. Background technique [0002] According to different strain test methods, force sensors are divided into resistance strain, capacitive strain, piezoelectric and other measurement methods. Resistance strain and piezoelectric sensors have simple structures and high measurement accuracy, but have slow dynamic response and difficult patch connection. problem, not conducive to mass production. At the same time, with the continuous development of industrial digitization and intelligence, the requirements for digital intelligence of sensors are further improved. [0003] The patent with the publication number CN109974916B discloses a variable pole pitch capacitive three-dimensional fo...

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Problems solved by technology

[0004] In this patent, it is necessary to provide a separate fixed pole plate corresponding to each movable pole plate for the movable pole plate at the end of each cross beam, and it is necessary to consider the relationship between each movable pole plate and the corresponding pole plate during manufacture. Fix the positional relationship between the plates to ensure the accuracy of the detection, which is time-consuming and labor-intensive to make

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