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Y-axis precision alignment assembly and alignment method of double-axis scribing machine

A dicing machine and Y-axis technology, which is applied in the field of Y-axis precision alignment components and alignment, can solve the problems of high alignment cost and deviation of Y-axis alignment accuracy, and achieve low debugging cost, simple installation, and improved cutting quality effect

Active Publication Date: 2022-03-22
沈阳和研科技股份有限公司
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Problems solved by technology

[0005] The purpose of the present invention is to provide a Y-axis precision alignment assembly and alignment method of a biaxial dicing machine, so as to solve the problem of deviation in the alignment accuracy of the two Y axes of the existing biaxial dicing machine and high alignment cost question

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  • Y-axis precision alignment assembly and alignment method of double-axis scribing machine

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Embodiment Construction

[0043] The technical solutions of the present invention will be clearly and completely described below in conjunction with the embodiments. Obviously, the described embodiments are part of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0044] Those skilled in the art can understand that, unless otherwise defined, all terms (including technical terms and scientific terms) used herein have the same meanings as commonly understood by those of ordinary skill in the art to which this invention belongs. It should also be understood that terms, such as those defined in commonly used dictionaries, should be understood to have meanings consistent with their meaning in the context of the prior art, and unless specifically defined as herein, are not intended to be...

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Abstract

The invention relates to the technical field of chip cutting equipment, and provides a Y-axis precision alignment assembly and alignment method of a double-axis scribing machine, and the Y-axis precision alignment assembly comprises a compensation grating tool, an image acquisition unit and a control unit; the grating supplementing tool is arranged on the first Y axis and comprises a positioning piece, and at least one positioning mark is arranged on the positioning piece. According to the invention, the second Y axis is aligned in advance, and meanwhile, the positioning sheet of the supplementary grating tool mounted on the first Y axis is used for providing a reference for linkage stepping alignment of the first Y axis and the second Y axis; the control unit compensates the first Y axis according to the position deviation of the imaging area of the positioning mark in the first image and the first calibration area along the Y axis direction after each linkage stepping of the first Y axis and the second Y axis, so that the synchronization precision of the first Y axis and the second Y axis is ensured, and the cutting quality of the two Y axes of the double-axis scribing machine on the same workpiece at the same time is improved; because only one image acquisition unit is installed, the installation is simple and the debugging cost is low.

Description

technical field [0001] The invention relates to the technical field of chip cutting equipment, in particular to a Y-axis precision alignment component and alignment method of a biaxial dicing machine. Background technique [0002] In the process of silicon wafer cutting, wafer cutting and special cutting, the dual-axis dicing machine mainly drives the Y-axis (including the first Y-axis and the second Y-axis) to move by means of the ball screw driven by the servo motor. There are certain errors in the drive of the servo motor, the ball screw, and the machined parts of the equipment. Therefore, it is necessary to use a grating scale displacement sensor to compensate the error of the Y-axis of the dual-axis dicing machine, so as to achieve precision calibration. [0003] At present, the existing two-axis dicing machine mainly adopts the method of two first Y-axis and the second Y-axis to calibrate the accuracy respectively, that is, first place the calibration ruler on the work...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D5/00B28D7/00B28D7/04H01L21/68H01L21/304
CPCB28D5/0005B28D5/0052B28D5/0058H01L21/681H01L21/3043
Inventor 张明明袁慧珠吴洪柏吴德宝徐双双石文
Owner 沈阳和研科技股份有限公司
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