Self-cleaning device of evaporation table for semiconductor processing

Abstract

The invention belongs to the technical field of semiconductor processing, and particularly relates to a self-cleaning device of an evaporation table for semiconductor processing, which comprises an evaporation table body, a moving structure, a mounting underframe, a lifting cylinder, an electric base, a vertical beam frame, a sweeping structure and a dust removal structure, a mounting bottom frame is mounted at one end of the moving structure, a lifting air cylinder is mounted in the center of the end face of the mounting bottom frame, an electric base is arranged above the top of the lifting air cylinder, and a vertical beam frame is fixedly mounted in the center of the end face of the top of the electric base; in the moving process of the moving structure, a lifting air cylinder and an electric base can adjust the height and the rotating angle of a vertical beam frame, so that the positions of a sweeping structure and a dust removal structure are adjusted, and the sweeping structure and the dust removal structure can conduct cleaning and dust removal on different positions of the top of the evaporation table body; the problem that cleaning dead corners are left is effectively solved, and a good self-cleaning effect is achieved.

Description

technical field [0001] The invention belongs to the technical field of semiconductor processing, in particular to a self-cleaning device of an evaporation table for semiconductor processing. Background technique [0002] A semiconductor refers to a material whose electrical conductivity is between that of a conductor and an insulator at room temperature. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, diodes are devices made of semiconductors. In the process of semiconductor processing, the original wafer needs to be processed by evaporation coating. [0003] Evaporation coating is a process of heating a metal with a lower melting point, so that the metal on the evaporation table is evaporated and attached to the wafer to be processed to form a coating. [0004] There are also some technical solutions about power generation in the...

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Problems solved by technology

[0007] In order to make up for the deficiencies of the existing technology, solve the problem that during the coating process of the evaporation table, the waste generated by the coating will accumulate on the surface of the evaporation table, and it is inconvenient to clean up after the waste solidifies; , a self-cleaning device for an evaporation table for semiconductor processing proposed by the present invention

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