Multi-layer structure strain sensor with high sensitivity

Abstract

The invention relates to the technical field of strain sensors, and provides a multilayer structure strain sensor with high sensitivity, which comprises a sensor body that comprises a first thin film layer, the first thin film layer is connected with a second thin film layer, and the second thin film layer far away from the first thin film layer is connected with a third thin film layer, wherein cavities are formed among the first thin film layer, the second thin film layer and the third thin film layer, and a strain core area is arranged on the first thin film layer; The second thin film layer enables the first thin film layer and the third thin film layer to be indirectly connected; the rigidity of the strain core area on the first thin film layer is lower than the rigidity of the areas on the two sides by combining with the parameter design of the strain core area, so that larger strain is generated on the strain core area of the first thin film layer. Therefore, even if the deformation of the measured object is small, the accurate measurement requirement can be met.

Description

technical field [0001] The invention relates to the technical field of strain sensors, in particular to a high-sensitivity strain sensor including a multi-layer structure capable of accurately measuring small deformations. Background technique [0002] The strain of an object is a very important geometric parameter, and its accurate measurement is of great significance in many aspects. Strain sensors are generally used to measure the strain generated by the deformation of an object. There are many kinds of strain sensors, according to the principle, there are resistive, capacitive, piezoelectric, inductive and optical and so on. [0003] For resistive strain sensors that are widely used in engineering, the resistive conductor foil is the most commonly used sensing element, which can convert strain changes on mechanical components into resistance changes. The resistance material of the resistance conductor foil can be selected from conductor materials such as metals, semico...

AI Technical Summary

Problems solved by technology

[0004] When the deformation of the measured object is small, the ordinary resistive conductor foil cannot be detected or it is difficult to meet the accurate measurement requirements. Sensing materials with higher sensitivity coefficients are required, which greatly increases engineering costs, or optical methods are required for measurement, and optical High device cost, not easily portable and difficult to miniaturize

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