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Gas mass flow controller

A gas mass flow, controller technology, applied in the direction of fluid pressure control, non-electric variable control, electric fluid pressure control, etc. environmental issues

Pending Publication Date: 2021-12-31
BEIJING SEVENSTAR FLOW CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The above-mentioned pressure-type gas mass flow controller inevitably has the following problems in practical applications, namely: self-calibration cannot be achieved, resulting in the inability of the gas mass flow controller to achieve self-calibration when it is installed in a new gas environment, so it cannot be applied to Many different gas environments

Method used

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Examples

Experimental program
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Effect test

no. 1 example

[0062] see figure 1 , the gas mass flow controller 1 provided in this embodiment includes a detection and calibration module 11, a flow adjustment module 12 and a control module 13, wherein the detection and calibration module 11 is used to receive the input gas to be controlled and deliver it to the flow rate The adjustment module 12, and the detection and calibration module 11 can detect the actual flow value of the gas to be controlled; the flow adjustment module 12 is used to output the above-mentioned gas to be controlled, and can detect and adjust the flow output value of the gas to be controlled.

[0063] The control module 13 is used to selectively switch between the detection calibration mode and the real-time detection mode. In the detection calibration mode, the control module 13 is used to control the detection calibration module 11 and the flow adjustment module 12 to detect the above-mentioned actual flow value and flow output respectively. value, and according t...

no. 2 example

[0069] see figure 2 , the gas mass flow controller 1 provided in this embodiment is a specific implementation of the above-mentioned first embodiment. Specifically, the detection and calibration module 11 includes an inlet valve group and a calibration cavity 114 , wherein the inlet valve group and the calibration cavity 114 The gas end is connected, and the inlet valve group is used for receiving the input gas to be controlled, and can detect the first air pressure value of the calibration chamber 114 , send it to the control module 13 , and open or close the intake end of the calibration chamber 114 .

[0070] In some optional embodiments, the above-mentioned inlet valve group may include an intake air passage 111 , an on-off valve 112 and a first pressure detection unit 113 , wherein the intake end of the intake air passage 111 is used to receive the input pending control gas, the outlet end of the intake air passage 111 is connected to the intake end of the calibration ch...

no. 3 example

[0106] Please also refer to Figure 8A and Figure 8B , the gas mass flow controller 1 ′ provided in this embodiment is an improvement made on the basis of the above-mentioned second embodiment, specifically, on the basis of the gas mass flow controller 1 adopted in the above-mentioned first embodiment , the gas mass flow controller 1' provided in this embodiment further includes an inlet adapter module 16, the inlet adapter module 16 includes an adapter, and an air inlet channel (not shown in the figure) is arranged in the adapter, The intake end of the intake passage is used to receive the input gas to be controlled, and the outlet end of the intake passage is used to communicate with the intake end of the above-mentioned outlet valve group (ie, the intake end of the outlet passage in the second base 124 ). ) communicates with each other; the above-mentioned adapter is detachably connected with the above-mentioned outlet valve group (ie, the second base 124 ). In this way,...

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Abstract

The invention provides a gas mass flow controller. A detection and calibration module is used for receiving input to-be-controlled gas, conveying the input to-be-controlled gas to a flow adjusting module and detecting the actual flow value of the flowing to-be-controlled gas; the flow adjusting module is used for outputting the to-be-controlled gas and can detect and adjust the flow output value of the to-be-controlled gas; a control module is used for controlling the detection and calibration module and the flow regulation module to respectively detect a flow actual value and a flow output value in a detection and calibration mode, and controlling the flow regulation module to regulate the flow of the output to-be-controlled gas according to the flow actual value and the flow output value, so that the flow is consistent with the flow actual value; and in the real-time detection mode, the flow adjusting module is controlled to detect the flow output value in real time, and the flow adjusting module is controlled to adjust the flow of the output to-be-controlled gas according to the flow output value and the flow output value, so that the flow is consistent with the flow set value. The gas mass flow controller provided by the invention has a self-calibration function, so that the gas mass flow controller can be suitable for various different gas environments.

Description

technical field [0001] The invention relates to the technical field of mass flow detection, in particular to a gas mass flow controller. Background technique [0002] Gas mass flow controller (Mass Flow Controller, MFC) is used for precise measurement and control of gas mass flow. It has important applications in scientific research and production in various fields such as semiconductor and integrated circuit technology, special material disciplines, chemical industry, petroleum industry, medicine, environmental protection and vacuum. [0003] The existing pressure type gas mass flow controller is composed of an inlet joint, a base, a flow regulating valve, a pressure sensor, an outlet joint and a control unit. The detection signal of the pressure sensor is input to the control unit, and the control unit controls the flow regulating valve to adjust the gas flow according to the flow value set by the user. [0004] The above-mentioned pressure-type gas mass flow controllers...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G05D16/20G01F25/00
CPCG05D16/2013G01F25/00
Inventor 肖漩杜井庆宋志辉
Owner BEIJING SEVENSTAR FLOW CO LTD
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