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High-precision free-form surface profiling measurement device and method based on three-dimensional measurement frame

A technology of three-dimensional measurement and measuring device, which is applied in the field of precision measurement, can solve problems such as inability to realize component surface shape detection, failure to meet measurement requirements, detection problems, etc., and achieve the effects of fast measurement speed, good versatility, and improved accuracy

Pending Publication Date: 2021-12-24
ZHEJIANG UNIV
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  • Application Information

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Problems solved by technology

[0003] Free-form surface optical elements have changing curvature characteristics in multiple directions, and some features have a steep surface close to 90°. Therefore, traditional measuring instruments such as spherical interferometers and profilers cannot detect the surface shape of such elements. Instruments such as coordinate measuring machines cannot meet their measurement needs due to their low efficiency and scratching the surface of components
At present, the detection of such components is still a difficult problem for the industry and academia

Method used

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  • High-precision free-form surface profiling measurement device and method based on three-dimensional measurement frame
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  • High-precision free-form surface profiling measurement device and method based on three-dimensional measurement frame

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Embodiment Construction

[0034] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0035] Such as figure 1 As shown, the vibration isolation base (1) is placed on the ground, the marble base (2) is horizontally installed on the vibration isolation base, and the X-axis motion platform (3) in the form of double drive and the flat crystal base (4) are installed on it. with C-axis turntable (18). Wherein the plane flat crystal (5) is installed above the plane flat crystal support (4). A B-axis pitch table (18) and a workpiece table (17) are stacked above the C-axis turntable (18), and the workpiece to be measured (16) is fixed on the workpiece table (17). A Y-axis motion table (8) and a Z-axis motion table (9) are stacked on the Y-axis gantry (6). The A-axis turntable (15) is installed at the bottom of the Z-axis motion table (9), and the Z-direction compensation probe bracket (21) and the Y-direction compensation probe bracket (24) are resp...

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Abstract

The invention discloses a high-precision free-form surface profiling measurement device and method based on a three-dimensional measurement frame. Three linear motion tables, two rotary tables and an angular displacement table are combined to form a six-axis linkage mechanism, and a high-precision displacement sensor is driven to move in six degrees of freedom in a three-dimensional space relative to a measured object, so that scanning measurement of a free-form surface with complex geometric characteristics such as high curvature and large rise is realized. In addition, the three-dimensional measurement frame is constructed through the high-precision displacement sensor, so that an error transfer chain is blocked, and various error sources such as straightness errors and positioning errors in the scanning process are compensated. The device and method are suitable for fast detection of the surface type of the free-form surface, can also be used for surface type detection of aspheric, spherical and planar elements, have the advantages of being good in universality, high in measurement speed and high in measurement precision, not only can solve the measurement problem in the current free-form surface manufacturing process, but also can meet the detection process of planar, spherical, aspheric and other optical elements.

Description

technical field [0001] The invention relates to the technical field of precision measurement, in particular to a high-precision free-form surface profiling measurement device and method based on a three-dimensional measurement frame. Background technique [0002] Free-form surface elements are a new generation of optical elements developed after planar elements, spherical elements, and aspheric elements. Compared with traditional spherical elements, aspheric elements have high-order geometric features, and can use fewer elements to achieve more complex performance, which can not only promote the light weight and miniaturization of optical systems, but also improve the imaging quality and performance of optical systems. Aspherical components usually have a rotationally symmetrical surface shape, and free-form surface components go a step further, with asymmetric and irregular surface geometry features. Typical components such as off-axis curved surfaces, microlens arrays, f-t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
CPCG01B11/24
Inventor 居冰峰张文浩朱吴乐李畅
Owner ZHEJIANG UNIV
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