Visible light heat reflection temperature measurement method and temperature measurement device

A technology of heat reflection and visible light, which is applied in the field of microelectronic temperature measurement, can solve the problems of poor improvement of measurement accuracy and achieve the effect of eliminating random interference and improving measurement accuracy

Active Publication Date: 2021-12-14
THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] In view of this, an embodiment of the present invention provides a visible light heat reflection temperature measurement method and temperature measurement equipment to solve the problem that the temperature measurement method in the prior art does not have a good effect on the improvement of measurement accuracy

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  • Visible light heat reflection temperature measurement method and temperature measurement device
  • Visible light heat reflection temperature measurement method and temperature measurement device
  • Visible light heat reflection temperature measurement method and temperature measurement device

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Embodiment Construction

[0028] In the following description, specific details such as specific system structures and technologies are presented for the purpose of illustration rather than limitation, so as to thoroughly understand the embodiments of the present invention. It will be apparent, however, to one skilled in the art that the invention may be practiced in other embodiments without these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the present invention with unnecessary detail.

[0029] In order to illustrate the technical solutions of the present invention, specific examples are used below to illustrate.

[0030] When visible light is irradiated on the surface of a certain material, the reflectivity of the material to visible light changes with the temperature of the material. There is a linear relationship between the change in the reflectivity of the material to visibl...

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Abstract

The invention is suitable for the technical field of microelectronic temperature measurement, and provides a visible light heat reflection temperature measurement method and a temperature measurement device. The method comprises the steps of controlling the temperature of a to-be-measured piece to be stabilized at a first preset temperature, and collecting the reflectivity of the to-be-measured piece as the first reflectivity; controlling the temperature of the to-be-measured piece to rise and stabilize at a second preset temperature, and collecting the reflectivity of the to-be-measured piece as a second reflectivity; controlling the temperature of the to-be-measured piece to reduce and stabilize at the first preset temperature, electrifying the to-be-measured piece, and after the temperature of the to-be-measured piece is stabilized, collecting the reflectivity of the electrified to-be-measured piece as a third reflectivity; correcting the third reflectivity according to the first reflectivity to obtain the corrected third reflectivity; and according to the first reflectivity, the second reflectivity and the corrected third reflectivity, determining the temperature variation of the to-be-measured piece. According to the invention, the third reflectivity after power-on is corrected by adopting the first reflectivity during power-off, so that the random interference can be effectively eliminated, and the measurement precision is improved.

Description

technical field [0001] The invention belongs to the technical field of microelectronic temperature measurement, and in particular relates to a visible light heat reflection temperature measurement method and temperature measurement equipment. Background technique [0002] Visible light heat reflection temperature measuring instrument calculates the change of material surface temperature by measuring the change of material surface reflectance. The readings of the visible light thermal reflection temperature measuring instrument not only change with the temperature, but also with the fluctuation of the light source, the random noise of the detector, the change of the external light intensity and other factors, which will introduce measurement errors. [0003] In the prior art, in order to improve the measurement accuracy of the visible light heat reflectance temperature measuring instrument, the data of the area with a small thermal reflectance calibration coefficient value is...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01K11/12G01K15/00
CPCG01K11/125G01K15/005
Inventor 翟玉卫默江辉王强栋刘岩李灏丁立强荆晓冬丁晨
Owner THE 13TH RES INST OF CHINA ELECTRONICS TECH GRP CORP
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