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Spectral confocal scanning displacement sensor device and use method thereof

A sensor device, a technology of scanning displacement, applied in measurement devices, color/spectral characteristic measurement, instruments, etc., can solve the problems of inconvenient popularization, high design and manufacturing cost, easy to be affected by errors, etc., and achieve compact structure and compact structure. The effect of reduced design and stable and reliable performance

Pending Publication Date: 2021-11-23
珠海横琴美加澳光电技术有限公司
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Problems solved by technology

This measurement method can only obtain a set of measurement data, which is easily affected by errors, and this sensor device often needs to be used in conjunction with a spectrometer, the design and manufacturing costs are high, and it is not easy to promote and use

Method used

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  • Spectral confocal scanning displacement sensor device and use method thereof
  • Spectral confocal scanning displacement sensor device and use method thereof
  • Spectral confocal scanning displacement sensor device and use method thereof

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Embodiment approach

[0059] like figure 2 As shown, as the second embodiment of the present invention, the optical signal receiving component uses a spectrometer 12 to receive and process the optical signal passing through the second focusing lens group 11 through the spectrometer. Since the response of the spectrometer is slow, it will affect the measurement efficiency. This implementation mode is only applicable to scenarios that require high-precision measurement and do not require high measurement efficiency.

[0060] A method for using a spectral confocal scanning displacement sensor device of the present invention, using such as figure 1 , 2Shown is a spectral confocal scanning displacement sensor device, the specific steps are as follows:

[0061] S1, adjust the multi-spectral light source 1, the first collimating lens group 2, the beam splitter 3, the first focusing lens group 4, the illumination pinhole 6, the second collimating lens group 7, the dispersion focusing lens group 8 and th...

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Abstract

The invention discloses a spectrum confocal scanning displacement sensor device and a use method thereof, and the device is sequentially provided with a multispectral light source, a first collimating lens group, a spectroscope, a first focusing lens group, an illumination pinhole, a second collimating lens group, a dispersion focusing lens group and a displacement platform along an incident optical axis. The first focusing lens group and the illumination pinhole are oppositely and fixedly arranged. The outer side of the first focusing lens group or the illumination pinhole is connected with a driving control piece used for controlling the first focusing lens group and the illumination pinhole to move axially, and focal plane movement of the dispersion focusing lens group is changed through axial movement, so that multiple times of measurement scanning are obtained, and the axial spectral characteristic of a measured value can be analyzed. The measuring precision is effectively improved, the measured panel is adjusted and moved in cooperation with the displacement platform, the surface type or the thickness of the measured panel is measured in a non-contact mode, and therefore the device has the advantages of being scientific and reasonable in design structure, accurate in measurement, economical in manufacturing cost, convenient and fast to use and operate and efficient.

Description

【Technical field】 [0001] The invention relates to the field of cutting-edge optical detection, in particular to a spectral confocal scanning displacement sensor device and a use method thereof. 【Background technique】 [0002] In terms of market demand, with the development of the industry, the advancement of technology, and the improvement of the technological level, the design of many types of mobile phone panels is becoming thinner and thinner, and the demand is large. Efficiency is also required to be higher and higher. [0003] At present, the most widely used measurement method in China is contact measurement, which is slow in measurement and easy to scratch the surface. Although there are existing non-contact optical measurement sensor devices in China, there are not many types of them, and there are problems of limited application, high cost, and insufficient accuracy. However, high-end non-contact optical measurement sensor devices are mainly designed and produced ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N21/25
CPCG01N21/255
Inventor 孙保福宋素霜
Owner 珠海横琴美加澳光电技术有限公司
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