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Eddy current sensor and magnetic suspension molecular pump with same

An eddy current sensor and sensor technology, applied in the field of sensors, can solve problems such as poor coil protection, achieve the effects of preventing electromagnetic interference, improving shielding efficiency, and improving monitoring accuracy

Pending Publication Date: 2021-10-19
北京中科九微科技有限公司
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Therefore, the technical problem to be solved by the present invention is to overcome the disadvantage of poor protection of the coil of the eddy current sensor in the prior art, thereby providing an eddy current sensor and a magnetic levitation molecular pump with the eddy current sensor

Method used

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  • Eddy current sensor and magnetic suspension molecular pump with same
  • Eddy current sensor and magnetic suspension molecular pump with same
  • Eddy current sensor and magnetic suspension molecular pump with same

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Embodiment Construction

[0027] The technical solutions of the present invention will be clearly and completely described below in conjunction with the accompanying drawings. Apparently, the described embodiments are some of the embodiments of the present invention, but not all of them. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0028] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" etc. The indicated orientation or positional relationship is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the referred device or element must have a specific orientation, ...

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Abstract

The invention provides an eddy current sensor and a magnetic suspension molecular pump with the same, and belongs to the technical field of sensors. The eddy current sensor comprises a shell and a winding rod arranged in the shell; a coil winds on the winding rod; an accommodating space for accommodating the coil is formed between the winding rod and the shell; the winding rod and the shell can perform axial relative movement, the head of the winding rod is provided with an annular flange matched with an opening in the top end of the shell, and the annular flange is matched with the shell, so that the coil can be sealed in the shell. According to the eddy current sensor, the wire is wound on the head of the winding rod to form the coil, and the head of the winding rod can retract into the shell, so that the coil is accommodated in the shell, the coil is protected, and the protection effect on the coil is improved.

Description

technical field [0001] The invention relates to the technical field of sensors, in particular to an eddy current sensor and a magnetic levitation molecular pump with the eddy current sensor. Background technique [0002] The eddy current sensor consists of a sensor excitation wire and a metal body to be tested. According to Faraday's law of electromagnetic induction, when the sensor excites the wire to pass a sinusoidal alternating current, a sinusoidal alternating magnetic field will be generated around the wire, causing the metal conductor in the magnetic field to generate an induced current, which in turn generates a new alternating magnetic field . The new alternating magnetic field hinders the change of the original magnetic field, so that the equivalent impedance of the sensor wire changes. [0003] In the prior art, Chinese patent document CN208383054U discloses an eddy current sensor, which includes an inductance mechanism on which an inductance wire is wound, and ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): F04D27/00F04D19/04G01D5/20
CPCF04D27/001F04D19/04G01D5/2006
Inventor 刘强张亮陈林
Owner 北京中科九微科技有限公司
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