Transfer robot and substrate processing apparatus having the same

Abstract

The present invention relates to a transfer robot for transferring a substrate through a transfer module and a substrate processing apparatus having the same. The invention discloses a substrate processing system, including: a transfer module provided with a transfer robot configured to transfer substrates; one or more dual process modules each of which is installed at one side of the transfer module so that two substrates are accessible at the same time and on which a pair of substrate support units configured to respectively seat the two substrates thereon are disposed horizontally; and one or more single process modules each of which is installed at one side of the transfer module so that one substrate is accessible and on which one or more substrate support units configured to seat the substrates thereon are provided. The transfer robot includes a first substrate seating unit and a second substrate seating unit, each of which has a seating surface, on which the substrate is seated, and which are disposed on the same first plane, and at least one of the first substrate seating unit or the second substrate seating unit is installed to be rotatable about a vertical rotation axis so as to be disposed in a region in which the at least one of the first substrate seating unit or the second substrate seating unit does not interfere with the substrate transfer when the substrates are transferred.

Description

Technical field [0001] The present invention relates to the transfer robot and a substrate processing system herein includes, more particularly, relates to a transport robot for transporting the substrate through the transmission module and this includes a substrate processing system. Background technique [0002] Typically, the cluster type substrate processing system may comprise: a conveying means for conveying the substrate transfer robot; disposed at one side of the transfer module to perform one or more substrate processing process module; disposed at one side of the transfer from the module to transmitting reception completion external substrate or the substrate processing substrate loaded locking module. [0003] In this case, the process module may be a substrate having disposed two process modules double portion or substrate support having a substrate supporting a single process module is placed a portion of the substrate. [0004] In the case of the single module of th...

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Problems solved by technology

[0008] However, depending on the substrate processing process, there is a case of a composite process required by both the single process module and the dual process module, and in the case where the substrate processing system of the single process module and the substrate processing system of the dual process module are separately established separately, the substrate processing system for the other substrate When the substrate is transported by the processing system, the substrate is inevitably exposed to the atmosphere, so there is a high possibility that the quality of the substrate processing will deteriorate, and there is a problem that it takes time to transport the substrate between the substrate processing systems, thereby reducing the yield.

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