Dispersion objective optical path

Abstract

The invention discloses a dispersion objective optical path. The optical path comprises a first lens group and a second lens group which are sequentially arranged from an object space to an image space, and is characterized in that the first lens group is used for controlling telecentric object space and carrying out preliminary dispersion on modulation detection light projected by an optical fiber array; the second lens group is used for controlling telecentric image space and performing secondary dispersion on the modulated detection light, and is used for zoom control from the object space to the image space through cooperation of the long focal length of the first lens group and the short focal length of the second lens group, the object space / image space zoom ratio= f1 / f2, f1 is the focal length of the first lens group, f2 is the focal length of the second lens group, the object space is an optical fiber array, and the image space is the line length projected by the dispersion objective lens light path. According to the dispersion objective lens light path disclosed by the invention, dispersion is generated by using a double telecentric light path, and consistency of brightness and precision of a measurement light spot projected on a measured object can be effectively ensured.

Description

technical field [0001] The invention belongs to the field of optics, in particular to a dispersion objective lens optical path for line spectrum confocal. Background technique [0002] With the rapid development of precision and ultra-precision manufacturing, the demand for high-precision detection is also increasing, so high-precision displacement sensors have also emerged as the times require. The precision of the ultra-precise displacement sensor can reach the micron level; although the traditional contact measurement also has high precision, it may scratch the surface of the measured object, and when the measured object is a weak rigidity or a light and soft material, Contact measurement will also cause elastic deformation and introduce measurement errors. In addition, the contact measurement speed is slow and it is difficult to realize automatic measurement. Based on the many shortcomings of contact measurement, non-contact displacement sensors have received greater att...

AI Technical Summary

Problems solved by technology

Usually, the above problems can be solved by increasing the number of optical channels, but simply increasing the number of optical channels cannot actually solve the contradiction between line length and resolution, because the increase in the number of optical channels (optical fibers) will introduce the above-mentioned non-central light The problem of channel consistency makes the design of the optical path too difficult. At the same time, there are also problems of high cost, excessive volume and weight.

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