Dual-laser interference nanoscale positioning measurement system

Abstract

The invention discloses a dual-laser interference nanoscale positioning measurement system which comprises a light source, a first beam splitter prism, a first rectangular prism, a second rectangular prism, a second beam splitter prism, a scalar interference light acquisition module, a vector interference light acquisition module and a displacement calculation module. A photoelectric detector collects the light intensity of reflected interference light in the position moving process of an object to be detected and generates a periodic light intensity change curve, and a CCD camera collects vortex interference photoelectric images before and after the position of the object to be detected moves. The displacement of the to-be-detected problem is calculated according to the integer period of the light intensity change curve and the change angle of the image of the vortex interference light before and after the position of the to-be-detected object is moved, the reflection interference light collected by the photoelectric detector is a scalar signal, the vortex interference light collected by the CCD camera is a vector signal, and the displacement is calculated comprehensively by combining the two signals. And the measurement resolution is improved, and meanwhile, the interference signals are quickly acquired and demodulated.

Description

technical field [0001] The invention relates to the technical field of displacement measurement, in particular to a dual-laser interference nanoscale positioning measurement system. Background technique [0002] The micro-nano displacement measurement technology based on the principle of laser interferometry is currently the most commonly used micro-nano displacement measurement method. After the Michelson interferometer was used for experiments for the first time, the interferometer has developed rapidly and has been widely used in measurement fields such as length, angle, and microscopic shape. At present, most researches on displacement measurement based on laser interferometer focus on the improvement of measurement resolution and stability. Ordinary scalar light field interference signal has the advantage of obvious bright and dark boundaries of interference fringes, but compared with vortex light field interference signal, it has the disadvantage of lacking a referenc...

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Problems solved by technology

But at the same time, the number of interference fringes in the vector vortex light field is more than that in the scalar light field, and the signal acquisition and demodulation is more difficult

[0003] At present, there is still a lack of an optical system that uses the vector vortex light field and the scalar light field to measure the nanometer displacement, thereby effectively improving the measurement resolution of the interferometer and realizing the fast acquisition and demodulation of the interference signal.

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