Device capable of improving aluminum oxidation surface quality

A technology of surface quality and aluminum oxidation, applied in the direction of ion implantation plating, coating, metal material coating process, etc., can solve the problems of smaller airbags, lower surface quality of workpieces, and reduced gas throughput.

Pending Publication Date: 2021-09-14
ZHEJIANG XINBO ALUMINUM PLASTIC PROD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] Aiming at the problems existing in the prior art, the object of the present invention is to provide a device that can improve the surface quality of aluminum oxide, which can burn up the reserved carbon in the compound chamber before the alumina gas is prepared in the compound chamber, and The continuous supply of oxygen ensures the discharge of carbon dioxide gas in the compound chamber, effectively avoiding the problem of generating toxic aluminum...

Method used

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  • Device capable of improving aluminum oxidation surface quality
  • Device capable of improving aluminum oxidation surface quality
  • Device capable of improving aluminum oxidation surface quality

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specific Embodiment 1

[0051] Specific embodiment one: please refer to Figure 1-3 A device that can improve the surface quality of aluminum oxidation, including a compound chamber 1, a heating plate 2, a coating chamber 5 and a workpiece 6.

[0052] The coating chamber 5 is located at the upper end of the compound chamber 1, and the workpiece 6 is located in the coating chamber 5.

[0053] The heating plate 2 is located in the compound chamber 1, and the heating plate 2 makes the temperature in the compound chamber 1 higher than 700°C.

[0054] An aluminum air pipe 4 , an oxygen pipe 7 and a nitrogen pipe 8 are connected through the outer wall of the compound chamber 1 .

[0055] The aluminum gas pipe 4 provides gaseous metal aluminum for the compound chamber 1 .

[0056] The oxygen pipe 7 provides oxygen for the compound chamber 1 .

[0057] The nitrogen pipe 8 provides nitrogen for the compound chamber 1 .

[0058] Oxygen is first introduced into the compound chamber 1 and the heating plate 2...

specific Embodiment 2

[0074] Specific embodiment two: on the basis of specific embodiment one, please refer to Figure 4-5 _ is a device that can improve the surface quality of aluminum oxidation, and the gas outlet levels of the aluminum gas pipe 4, the oxygen pipe 7 and the nitrogen pipe 8 are distributed from high to low in sequence. As a stable gas, nitrogen has a density lower than that of oxygen and gaseous metal aluminum. The continuous introduction of nitrogen can push the alumina gas to float up, so that the alumina gas can contact the surface of the workpiece 6 in time, and effectively increase the evaporation speed of the workpiece.

[0075] There are three impellers 3 in the compound chamber 1, and the fan blades 301 of the three impellers 3 correspond to the air outlets of the aluminum air pipe 4, the oxygen pipe 7 and the nitrogen pipe 8 respectively. The axles 302 of the impellers 3 are all rotatably connected with the inner wall of the compound chamber 1 . The impeller 3 can accele...

specific Embodiment 3

[0078] Specific embodiment three: on the basis of specific embodiment two, please refer to Figure 6 A device that can improve the surface quality of aluminum oxidation, and the inner rings of the lower sub-ring 108 and the upper sub-ring 109 are fixed with airbags 103 . The airbag 103 can offset the change in the amount of alumina sprayed due to temperature change. The amount of aluminum oxide ejected at different times is further kept constant to effectively ensure the surface quality of the workpiece 6 .

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Abstract

The invention discloses a device capable of improving the aluminum oxidation surface quality, and belongs to the technical field of aluminum oxidation equipment. The device capable of improving the aluminum oxidation surface quality comprises a chemical combination bin, a heating plate, a film coating bin and a workpiece, the film coating bin is located at the upper end of the chemical combination bin, the workpiece is located in the film coating bin, an aluminum gas pipe and an oxygen pipe are connected to the outer wall of the chemical combination bin in a penetrating mode, an exhaust port is formed in the lower side wall of the chemical combination bin, annular air bags are arranged in the chemical combination bin, and an air inlet communicates with the film coating bin. According to the device, carbon reserved in the chemical combination bin can be burnt completely before the aluminum oxide gas is prepared in the chemical combination bin, so that the problem that toxic aluminum nitride and carbon monoxide gas are generated when the aluminum oxide gas is prepared is effectively avoided; and meanwhile, the air bags in the chemical combination bin can expand along with temperature rise, gas can only pass through the inner sides of the air bags, the space between the inner sides of the air bags becomes smaller when the temperature rises, the gas passing amount is reduced, and the problem that the workpiece surface quality is reduced due to excessive sprayed aluminum oxide gas is effectively avoided.

Description

technical field [0001] The invention belongs to the technical field of aluminum oxidation equipment, and more specifically relates to a device capable of improving the surface quality of aluminum oxidation. Background technique [0002] In a vacuum environment, the technique of heating and depositing materials onto a substrate is vacuum evaporation. Specifically, vacuum evaporation is a process in which the substance to be formed into a film is evaporated or sublimated in a vacuum, so that it is deposited on the surface of the workpiece or substrate. The metal coating in vacuum evaporation is usually an aluminum film, but other metals can also be formed by evaporative deposition. With the rapid development of my country's electrolytic aluminum, ceramics, medicine, electronics, machinery and other industries, there is still a large room for growth in the market demand for alumina, and the output of alumina will continue to increase. [0003] In the existing vacuum evaporati...

Claims

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Application Information

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IPC IPC(8): C23C14/56C23C14/24C23C14/08
CPCC23C14/564C23C14/24C23C14/0021C23C14/081
Inventor 成蓓榕成逸方徐建达
Owner ZHEJIANG XINBO ALUMINUM PLASTIC PROD
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