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Long-optical-path miniature infrared gas chamber and infrared gas sensor

A gas sensor and long optical path technology, which is applied in the field of infrared sensing, can solve problems affecting the accuracy of detection signals, light reflection attenuation, and increasing optical path, so as to ensure optical power intensity, avoid scattering attenuation, and improve resolution. Effect

Active Publication Date: 2021-09-03
SHENZHEN NUOAN SENSOR TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

For example, the Chinese utility model patent with the announcement number CN202092949U proposes a "C"-shaped optical channel with multiple continuous reflective surfaces, and the Chinese invention patent with the patent publication number CN101825566A proposes a "spiral-shaped" air channel. Chamber channels, such as US patent US7244939B2, proposes a multiple-reflection "ring" air chamber channel. The reflection of light in these reflective optical air chambers will cause attenuation of light reflection and affect the accuracy of detection signals.
In addition, the optical path can be increased by designing a mirror resonant cavity so that the beam is reflected back and forth in the gas chamber, such as using a White cell and a Herriott cell, but this structure requires a mid-infrared laser with excellent collimation as a light source, which is expensive

Method used

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  • Long-optical-path miniature infrared gas chamber and infrared gas sensor
  • Long-optical-path miniature infrared gas chamber and infrared gas sensor
  • Long-optical-path miniature infrared gas chamber and infrared gas sensor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0041] Such as figure 1 , figure 2 As shown, a long optical path micro-infrared air chamber includes an optical air chamber main body, and the inner wall of the optical air chamber main body is coated or electroplated with a reflective layer. The main body of the optical gas chamber communicates with the external environment to be measured through an air inlet channel (not shown in the figure), and the gas in the external environment to be measured enters into the main body of the optical air chamber through the air inlet channel.

[0042] The main body of the optical cell includes an annular outer reflective wall 10 and an inner reflective wall 20 located inside the outer reflective wall 10. Both the outer reflective wall 10 and the inner reflective wall 20 are connected to the bottom plate 11, and the bottom plate 11 is provided with a light detector for passing through the light. The detector through hole 12 of the detector, and the light source through hole (not shown in...

Embodiment 2

[0058] Such as Figure 6 , Figure 7 As shown, a long optical path miniature infrared gas chamber is different from Embodiment 1 in that the number of sides n of a regular polygon in this embodiment is 6, that is, the number of plane reflectors 201 and concave reflectors 101 is 6, that is Six plane mirrors 201 are arranged in a hexagon, and six concave mirrors 101 are arranged on the periphery of the regular hexagon.

[0059] Such as Figure 10 As shown, the center of curvature of each concave reflector 101 (i.e. the center of circle O2) is located on the center line of the inner angle of the corresponding regular polygon (i.e. the line connecting the inner angle and the center of the regular polygon), and the curvature of each position of the concave reflector 101 same, and its radius of curvature R satisfies:

[0060] Wherein d is the distance from the center of the concave mirror 101 to the apex of the regular polygon adjacent to it, a is the side length of the regular...

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Abstract

The invention discloses an infrared gas sensor of a long-optical-path miniature infrared gas chamber in the technical field of infrared sensing. The infrared gas sensor comprises a circuit board and the long-optical-path miniature infrared gas chamber, and a light source and a light detector on the circuit board extend into an optical gas chamber main body of the long-optical-path miniature infrared gas chamber. The long-optical-path miniature infrared gas chamber comprises an optical gas chamber body, the optical gas chamber body comprises an annular outer reflecting wall and an inner reflecting wall arranged in the outer reflecting wall, the outer reflecting wall comprises a plurality of concave reflecting mirrors, the side faces of the concave reflecting mirrors are sequentially connected to form a ring, the inner reflecting wall comprises a plurality of plane reflecting mirrors, the side faces of the plane reflecting mirrors are sequentially connected to form a regular polygon, and the curvature center of each concave reflecting mirror is located on the center line of the corresponding inner angle in the regular polygon. Through the special optical gas chamber structural design, the requirement of the gas chamber for the divergence angle of a light source is reduced, a large effective optical path can be ensured in an effective volume, and the gas detection resolution of the sensor is improved.

Description

technical field [0001] The invention relates to the technical field of infrared sensing, in particular to a long optical path miniature infrared gas chamber and a sensor. Background technique [0002] Industrial gas sensors are an important guarantee for gas safety. With the rapid development of my country's economy and the continuous optimization of industrial applications of the Internet of Things, industrial sensors have gradually developed in the direction of low power consumption, miniaturization, and portability in recent years. Among them, the infrared optical gas sensor has the advantages of fast response, high measurement accuracy, strong anti-interference ability, long service life, etc., and will not appear harmful gas poisoning, aging, etc., and has been widely recognized by the market. The working principle of the infrared optical gas sensor is to use the natural vibration and rotation frequency of gas molecules to absorb the infrared light signal of a specific ...

Claims

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Application Information

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IPC IPC(8): G01N21/3504G01N21/01
CPCG01N21/3504G01N21/01G01N2021/0112
Inventor 卿笃安曹绍情
Owner SHENZHEN NUOAN SENSOR TECH CO LTD
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