Long-optical-path miniature infrared gas chamber and infrared gas sensor
A gas sensor and long optical path technology, which is applied in the field of infrared sensing, can solve problems affecting the accuracy of detection signals, light reflection attenuation, and increasing optical path, so as to ensure optical power intensity, avoid scattering attenuation, and improve resolution. Effect
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Embodiment 1
[0041] Such as figure 1 , figure 2 As shown, a long optical path micro-infrared air chamber includes an optical air chamber main body, and the inner wall of the optical air chamber main body is coated or electroplated with a reflective layer. The main body of the optical gas chamber communicates with the external environment to be measured through an air inlet channel (not shown in the figure), and the gas in the external environment to be measured enters into the main body of the optical air chamber through the air inlet channel.
[0042] The main body of the optical cell includes an annular outer reflective wall 10 and an inner reflective wall 20 located inside the outer reflective wall 10. Both the outer reflective wall 10 and the inner reflective wall 20 are connected to the bottom plate 11, and the bottom plate 11 is provided with a light detector for passing through the light. The detector through hole 12 of the detector, and the light source through hole (not shown in...
Embodiment 2
[0058] Such as Figure 6 , Figure 7 As shown, a long optical path miniature infrared gas chamber is different from Embodiment 1 in that the number of sides n of a regular polygon in this embodiment is 6, that is, the number of plane reflectors 201 and concave reflectors 101 is 6, that is Six plane mirrors 201 are arranged in a hexagon, and six concave mirrors 101 are arranged on the periphery of the regular hexagon.
[0059] Such as Figure 10 As shown, the center of curvature of each concave reflector 101 (i.e. the center of circle O2) is located on the center line of the inner angle of the corresponding regular polygon (i.e. the line connecting the inner angle and the center of the regular polygon), and the curvature of each position of the concave reflector 101 same, and its radius of curvature R satisfies:
[0060] Wherein d is the distance from the center of the concave mirror 101 to the apex of the regular polygon adjacent to it, a is the side length of the regular...
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