Frequency-adaptive low-temperature plasma pulse power supply system

Abstract

The invention discloses a frequency-adaptive low-temperature plasma pulse power supply system. The system comprises a power supply module which supplies power to the system; a discharge module which converts direct-current power input into alternating current and boosts the alternating current to enable a plasma discharger to generate plasma; a frequency self-adaptive module which is used for determining the resonant frequency of the circuit by detecting the output peak voltage of the discharge module; and a control module which is used for processing a signal transmitted by the frequency self-adaptive module and controlling the discharge module to work according to the signal. The optimal working frequency can be automatically determined according to the discharge parameters of different discharge structures. According to the frequency response of different discharge structures, the system can automatically calculate the optimal working frequency which enables the circuit to reach the discharge condition more easily according to the discharge parameter of each discharge structure, and the frequency self-adaption of the power supply system is ensured from the circuit design and the controller algorithm design.

Description

technical field [0001] The invention belongs to the technical field of power supply, in particular to a low-temperature plasma pulse power supply system with self-adaptive frequency. Background technique [0002] Plasma is the fourth state of matter other than solid, liquid, and gaseous states. It is a macroscopically electrically neutral air mass composed of particles such as electrons, ions, atoms, molecules, and active free radicals. Plasma itself has strong conductivity but is electrically neutral as a whole, can interact with magnetic fields, has high-energy electrons, is chemically active and has luminous properties. Inside the plasma, various particles cannot reach a unified thermodynamic equilibrium state, but each particle has its own equilibrium temperature. According to this, the plasma can be divided into low-temperature plasma and high-temperature plasma. Among them, heavy particles A plasma whose temperature is much lower than that of electrons is called a low...

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Problems solved by technology

[0006] Although the traditional frequency sweep method can achieve the discharge effect, the output voltage corresponding to most of the driving signals fails to meet the plasma excitation voltage requirements, but at the same time the circuit is still working under the driving signal, which will cause unnecessary energy loss. This is unacceptable for a small power supply

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