Preparation method of anti-laser-damage mixed VO<X> phase

Abstract

The invention discloses a preparation method of an anti-laser-damage mixed VO<X> phase, and belongs to a functional thin film material. The preparation method of the anti-laser-damage mixed VO<X> phase aims to solve the problem that the laser protection efficiency of a thin film is greatly limited due to uneven optical modulation performance of vanadium oxide thin films prepared by adopting different processes in the prior art. The preparation method the anti-laser-damage mixed VO<X> phase comprises the following steps of S1, ultrasonically cleaning a substrate material and a target material; S2, mounting a V<2>O<3> target material; S3, pumping air in a vacuum chamber; S4, setting the deposition temperature, and adopting direct-current bias voltage backwash cleaning; and S5, reducing the air pressure to 0.5-1.5 Pa after plasma is lightened, simultaneously introducing 0.3-0.8 sccm of O<2>, setting the bias voltage to be-100 to-140 V, carrying out pre-sputtering to clean the surface of the target material, then opening a baffle plate, and depositing the thin film. An annealing method can also be adopted. According to the preparation method of the anti-laser-damage mixed VO<X> phase, the high-VO<2>-ratio mixed crystalline VO<X>-phase thin film with main components of VO<2> and V<2>O<5> is prepared by utilizing a radio frequency magnetron sputtering process and controlling deposition process parameters.

Description

technical field [0001] The invention belongs to functional film materials, and in particular relates to a preparation method of laser protection materials. Background technique [0002] With the rapid development of laser technology, laser technology has been greatly promoted and applied in various fields of life and production, such as the application of laser bird repelling technology and laser cameras, etc., but many laser pollutions have been generated while bringing benefits. When the laser irradiates the human eye, it is very easy to cause retinal damage and even blindness. At the same time, the laser has the problem of blinding or even damaging the detection system of aircraft, etc., which seriously threatens the operation safety of the detection system. At present, there are many protection methods against lasers, such as linear protection methods and nonlinear protection methods, but all of them have disadvantages that cannot be ignored. Linear protective material...

AI Technical Summary

Problems solved by technology

[0012] The purpose of the present invention is to solve the problem that the optical modulation properties of vanadium oxide films prepared by different processes are uneven, which greatly limits the laser protection efficiency of the film, and provide anti-laser damage mixed VO x Phase preparation method

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