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Method for purifying hexafluorobutadiene

A technology of hexafluorobutadiene and its refining method, which is applied in the field of hexafluorobutadiene refining, can solve the problems such as the reduction of the purity of hexafluorobutadiene, and achieve the effect of inhibiting isomerization

Pending Publication Date: 2021-08-06
DAIKIN IND LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in the prior art, there are the following problems: hexafluorobutadiene reacts with zeolite, isomerization of hexafluorobutadiene occurs, and the purity of hexafluorobutadiene decreases

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0084] filled with SiO 2 / Al 2 o 3 The ratio is 6.1 and the average pore diameter is 50 g of the composition containing hexafluorobutadiene was filled in a 100-mL stainless steel cylinder containing 10 g of zeolite, and kept at -18° C. for 20 hours. As a result of analysis by gas chromatography, the purity of hexafluorobutadiene in the composition after contact with the zeolite was 99.997% by volume. Since the concentration of the isomer of hexafluorobutadiene was below the detection limit, it was judged to be 0% by volume.

Embodiment 2

[0086] filled with SiO 2 / Al 2 o 3 The ratio is 5.5 and the average pore size is 50 g of the composition containing hexafluorobutadiene was filled in a 100-mL stainless steel cylinder containing 10 g of zeolite, and kept at -18° C. for 20 hours. As a result of analysis by gas chromatography, the purity of hexafluorobutadiene in the composition after contact with the zeolite was 99.995% by volume. Since the concentration of the isomer of hexafluorobutadiene was below the detection limit, it was judged to be 0% by volume.

[0087] (2) Purification method of hexafluorobutadiene of comparative example

[0088] A composition containing hexafluorobutadiene (the purity of hexafluorobutadiene is 99.875% by volume) and SiO 2 / Al 2 o 3 The ratio exceeds 4.0-8.0 zeolite contact.

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Abstract

The purpose of the present disclosure is to purify hexafluorobutadiene to a high purity while inhibiting the isomerization of hexafluorobutadiene. A method for purifying hexafluorobutadiene, said method comprising a step for contacting a composition containing hexafluorobutadiene with zeolite having an SiO2 / Al2O3 ratio of 4.0-8.0.

Description

technical field [0001] The invention relates to a method for refining hexafluorobutadiene. Background technique [0002] Hexafluorobutadiene is widely used as an etching gas in semiconductor manufacturing processes. [0003] Conventionally, hexafluorobutadiene is purified by removing impurities using a solid adsorbent such as zeolite (for example, Patent Documents 1 and 2). However, in the prior art, there is a problem that hexafluorobutadiene reacts with zeolite to cause isomerization of hexafluorobutadiene, and the purity of hexafluorobutadiene decreases. [0004] prior art literature [0005] patent documents [0006] Patent Document 1: Patent No. 3866663 [0007] Patent Document 2: Patent No. 5607354 Contents of the invention [0008] The technical problem to be solved by the invention [0009] The object of the present invention is to suppress isomerization of hexafluorobutadiene and purify hexafluorobutadiene to high purity. [0010] Technical solutions for te...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C07C21/20C07C17/389
CPCC07C17/389C07C21/20H01L21/3065
Inventor 西海雅巳中井胜也
Owner DAIKIN IND LTD
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