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Metamaterial modulator

A technology of modulators and metamaterials, which is applied in the direction of instruments, antennas, electrical components, etc., can solve the problems of single modulation performance and insufficient flexibility of modulation effects, and achieve the effects of high modulation depth, rich and flexible modulation, and wide modulation bandwidth

Active Publication Date: 2021-07-23
JIANGSU UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a metamaterial modulator with the function of modulating the amplitude and resonance frequency at the same time, so as to solve the problems of single-material modulators with single modulation performance and inflexible modulation effect

Method used

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Embodiment 1

[0056] like figure 1 As shown, the embodiment of the present invention provides a metamaterial modulator, which includes a surface layer 1, a graphene layer 2, a first flexible dielectric layer 3, a perovskite layer 4, and a metal structure arranged from top to bottom. layer 5, second flexible dielectric layer 6 and underlying substrate layer 7;

[0057] Wherein, the second flexible dielectric layer 6 is attached to the upper surface of the underlying substrate layer 7, the metal structure layer 5 is attached to the upper surface of the second flexible dielectric layer 6, the perovskite layer 4 covers the metal structure layer 5, and the first flexible dielectric layer 3 Attached to the upper surface of the perovskite layer 4 , the graphene layer 2 is attached to the upper surface of the first flexible dielectric layer 3 , and the surface layer 1 is attached to the upper surface of the graphene layer 2 .

[0058] This metal structure layer 5 is made up of several metal struct...

Embodiment 2

[0078] like Figure 7 As shown, the embodiment of the present invention provides a method for preparing a metamaterial modulator, the method comprising:

[0079] S1. Prepare a layer of high-resistance silicon layer as the underlying substrate layer 7 .

[0080] Prepare a layer of 500 μm thick high-resistance silicon layer.

[0081] S2, polyimide is spin-coated on the underlying substrate layer 7, and the specific steps include:

[0082] Spin-coat 10 μm thick polyimide film on 500 μm high-resistance silicon: After cleaning the prepared high-resistance silicon, spin-coat a polyimide solution with a viscosity of 3600 (centipoise) on the polished surface, and the spin-coating time is 60 seconds at 2200RPM. Then the polyimide solution is baked, the baking temperature is 120° C., 200° C. and 230° C. for 1 hour respectively, and then the baking is continued for 2 hours at 250° C.

[0083] S3. Spin-coat photoresist on the polyimide, and prepare the metal structure layer 5 by using a...

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Abstract

The invention relates to a metamaterial modulator, which comprises a surface layer, a graphene layer, a first flexible dielectric layer, a perovskite layer, a metal structure layer, a second flexible dielectric layer and a bottom substrate layer which are arranged from top to bottom, wherein the metal structure layer is composed of a plurality of metal structures, the conductivity change of the graphene layer and the perovskite layer is caused by laser incidence in a modulation process, incident terahertz waves are regulated twice while the graphene layer and the surface layer are provided with electrodes so as to carrying out multi-material photoelectric combined regulation on the terahertz waves through an electric field, and in the modulation process, the metal structure interacts with the terahertz waves to generate resonance so as to increase the modulation depth.

Description

technical field [0001] The invention relates to the technical field of novel dynamic modulation terahertz wave metamaterials, in particular to a metamaterial modulator capable of simultaneously modulating the amplitude and resonance frequency. Background technique [0002] Metamaterials are artificial superstructures with subwavelength sizes that are periodically arranged, and have unique electromagnetic properties that natural materials do not have. The geometry of the artificially designed cell structure has a unique optical response to electromagnetic waves. In recent years, artificial metamaterials have become the focus of the development of unconventional optical devices. With people's pursuit of more diverse functions, the functional diversification of metamaterials continues to expand to the field of dynamic adjustment. The field of optoelectronically tunable graphene-perovskite metamaterials is a key area for enhancing optical response. In the context of this opto...

Claims

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Application Information

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IPC IPC(8): G02F1/03H01Q15/00
CPCG02F1/0305G02F1/0316G02F1/0327H01Q15/0086H01Q15/0026H01Q15/002Y02E10/549
Inventor 杨茂生梁兰菊闫昕姚海云韦德泉王猛
Owner JIANGSU UNIV
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