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Probe mechanism and variable-temperature vacuum probe platform

A probe and vacuum technology, applied in the direction of measuring devices, material analysis through optical means, instruments, etc., can solve the problem that the probe is easy to scratch the material

Pending Publication Date: 2021-07-06
武汉佰力博科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] In view of this, it is necessary to provide a probe mechanism and a variable temperature vacuum probe platform to solve the technical problem that the probe is easy to scratch the material to be detected in the prior art

Method used

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  • Probe mechanism and variable-temperature vacuum probe platform
  • Probe mechanism and variable-temperature vacuum probe platform
  • Probe mechanism and variable-temperature vacuum probe platform

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Embodiment Construction

[0033] Preferred embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings, wherein the accompanying drawings constitute a part of the application and together with the embodiments of the present invention are used to explain the principle of the present invention and are not intended to limit the scope of the present invention.

[0034] The invention provides a variable temperature vacuum probe platform, such as figure 1 and figure 2 As shown, it includes a fixing mechanism 1, a vacuum mechanism 2, a microscope mechanism 3, a sample supporting mechanism 4, a plurality of probe mechanisms 5, and a heating and cooling mechanism 6. The fixing mechanism 1 includes a first housing 11, a second housing 12, two A U-shaped bracket 13, the interior of the first housing 11 is hollow and the top is open, the interior of the second housing 12 is hollow and the bottom is open, the top of the second housing 12 is provided with a f...

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Abstract

A probe mechanism disclosed by the present invention comprises a probe assembly, the probe assembly comprises a fixed part, a probe and a first elastic part, the probe is slidably connected to the fixed part along the axial direction of the probe, and the first elastic part is connected to the fixed part and the probe and is used for providing elastic damping for the movement of the probe relative to the fixed part. The invention can effectively prevent the probe from scratching the sample to be detected.

Description

technical field [0001] The invention relates to the technical field of material electrical performance measurement, in particular to a probe mechanism and a variable temperature vacuum probe platform. Background technique [0002] In the process of research and development of new materials, it is necessary to measure the electrical performance parameters of new materials such as square resistance, resistivity, and temperature coefficient of resistance. [0003] In the current four-probe tester on the market, when the material to be tested is tested through the probe, the probe gradually approaches the material to be tested, but because the probe is rigidly connected to the mechanism that drives the probe to move, when the probe touches If the force continues to move after the material to be tested, the force driving the probe to move will directly act on the material to be tested, which is easy to scratch the material to be tested, and the design is unreasonable. Contents ...

Claims

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Application Information

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IPC IPC(8): G01N21/01G01N21/84G01N27/02
CPCG01N21/01G01N21/84G01N27/02
Inventor 方辉
Owner 武汉佰力博科技有限公司
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