Sample position holding device for vacuum cavity

Abstract

The invention provides a sample position holding device for a vacuum cavity, which comprises a vacuum cavity, a connecting rod, a sample table, a displacement table and at least two cameras, wherein the sample table is located at one end of the connecting rod, the other end of the connecting rod is connected with the displacement table through a flange, the vacuum cavity is configured to be at least provided with a partial visible flange window, and the cameras are located outside the vacuum cavity. The camera is configured to photograph a position of the sample table. The binocular vision system is combined with the composite horizontal displacement table, the position of the sample table is corrected in real time, so that the sample is always kept at the rotating center position in the testing process, and the device can be applied to light sources with light spots of different sizes; The high-precision positioning of the sample position in the photoelectron spectroscopy experiment is realized, and the continuous temperature change measurement can be carried out.

Description

Technical field [0001] The present application relates to the field of experimental equipment, and more particularly to a sample position holding device for a vacuum chamber. Background technique [0002] In traditional ultra-high vacuum experimental equipment, such as angular distraction, electronics, etc., the position of the sample to be tested is highly required. However, as the temperature change of the sample table, the sample table in the vacuum chamber will be deformable due to thermal expansion, thereby causing relative movement between the samples on the sample table to the light source. In general, when the temperature changes from 4K (low temperature) to 300K (room temperature), the relative movement of the relative movement occurs in millimeter level, far greater than the light spot and the size of the sample. And this relative displacement causes the sample to deviate from the light source, thereby difficult to perform the relationship characterization of continuous...

AI Technical Summary

Problems solved by technology

When the meter-level sample stage has a millimeter-level relative displacement due to temperature changes, in the prior art, only a series of complex designs can be used to reduce the effect of thermal expansion and cold contraction of the sample stage

However, the angle-resolved photoelectron spectrometer requires that the position control accuracy of the sample sometimes reach the micron level. The designs in the prior art are not only complicated and costly, but also unable to maintain the position at the micron level when the temperature range is large.

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